6/26/2010	12:09:37 AM	Helium valve closed
6/26/2010	12:09:37 AM	PH3 valve closed
6/26/2010	12:09:37 AM	Main Vac valve closed
6/26/2010	12:09:37 AM	Bypass valve closed
6/26/2010	12:09:37 AM	H2 valve opened
6/26/2010	12:09:37 AM	BCl3 valve opened
6/26/2010	12:09:37 AM	SiCl4 pre valve opened
6/26/2010	12:09:37 AM	SiCl4 post valve opened
6/26/2010	12:09:37 AM	Bubbler valve opened
6/26/2010	12:09:37 AM	Helium MFC set to  0.000000
6/26/2010	12:09:37 AM	H2 MFC set to  500.000000
6/26/2010	12:09:37 AM	BCl3 MFC set to  35.000000
6/26/2010	12:09:37 AM	PHl3 MFC set to  0.000000
6/26/2010	12:09:37 AM	SiCl4 MFC set to  50.000000
6/26/2010	12:09:37 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:09:37 AM	Tube furnace set to 1000
6/26/2010	12:29:37 AM	H2 valve closed
6/26/2010	12:29:37 AM	BCl3 valve closed
6/26/2010	12:29:37 AM	PH3 valve closed
6/26/2010	12:29:37 AM	SiCl4 pre valve closed
6/26/2010	12:29:37 AM	SiCl4 post valve closed
6/26/2010	12:29:37 AM	Main Vac valve closed
6/26/2010	12:29:37 AM	Bypass valve closed
6/26/2010	12:29:37 AM	Helium valve opened
6/26/2010	12:29:37 AM	Bubbler valve opened
6/26/2010	12:29:37 AM	Helium MFC set to  500.000000
6/26/2010	12:29:37 AM	H2 MFC set to  0.000000
6/26/2010	12:29:37 AM	BCl3 MFC set to  0.000000
6/26/2010	12:29:37 AM	PHl3 MFC set to  0.000000
6/26/2010	12:29:37 AM	SiCl4 MFC set to  0.000000
6/26/2010	12:29:37 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:29:37 AM	Tube furnace set to 0
6/26/2010	12:49:37 AM	Helium valve closed
6/26/2010	12:49:37 AM	H2 valve closed
6/26/2010	12:49:37 AM	BCl3 valve closed
6/26/2010	12:49:37 AM	PH3 valve closed
6/26/2010	12:49:37 AM	SiCl4 pre valve closed
6/26/2010	12:49:37 AM	SiCl4 post valve closed
6/26/2010	12:49:37 AM	Main Vac valve closed
6/26/2010	12:49:37 AM	Bypass valve closed
6/26/2010	12:49:37 AM	Bubbler valve closed
6/26/2010	12:49:37 AM	Helium MFC set to  0.000000
6/26/2010	12:49:37 AM	H2 MFC set to  0.000000
6/26/2010	12:49:37 AM	BCl3 MFC set to  0.000000
6/26/2010	12:49:37 AM	PHl3 MFC set to  0.000000
6/26/2010	12:49:37 AM	SiCl4 MFC set to  0.000000
6/26/2010	12:49:37 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:49:37 AM	Tube furnace set to 0
6/26/2010	12:49:37 AM	Run finished at 12:49 AM
6/26/2010	12:54:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/26/2010	12:54:58 AM	Recipe started at 12:54 AM
6/26/2010	12:54:58 AM	H2 valve closed
6/26/2010	12:54:58 AM	BCl3 valve closed
6/26/2010	12:54:58 AM	PH3 valve closed
6/26/2010	12:54:58 AM	SiCl4 pre valve closed
6/26/2010	12:54:58 AM	SiCl4 post valve closed
6/26/2010	12:54:59 AM	Main Vac valve closed
6/26/2010	12:54:59 AM	Bypass valve closed
6/26/2010	12:54:59 AM	Bubbler valve closed
6/26/2010	12:54:59 AM	Helium valve opened
6/26/2010	12:54:59 AM	Helium MFC set to  500.000000
6/26/2010	12:54:59 AM	H2 MFC set to  0.000000
6/26/2010	12:54:59 AM	BCl3 MFC set to  0.000000
6/26/2010	12:54:59 AM	PHl3 MFC set to  0.000000
6/26/2010	12:54:59 AM	SiCl4 MFC set to  0.000000
6/26/2010	12:54:59 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:54:59 AM	Tube furnace set to 0
6/26/2010	12:55:01 AM	Helium valve closed
6/26/2010	12:55:01 AM	H2 valve closed
6/26/2010	12:55:01 AM	BCl3 valve closed
6/26/2010	12:55:01 AM	PH3 valve closed
6/26/2010	12:55:01 AM	SiCl4 pre valve closed
6/26/2010	12:55:01 AM	SiCl4 post valve closed
6/26/2010	12:55:01 AM	Main Vac valve closed
6/26/2010	12:55:01 AM	Bypass valve closed
6/26/2010	12:55:01 AM	Bubbler valve closed
6/26/2010	12:55:01 AM	Helium MFC set to  0.000000
6/26/2010	12:55:01 AM	H2 MFC set to  0.000000
6/26/2010	12:55:01 AM	BCl3 MFC set to  0.000000
6/26/2010	12:55:01 AM	PHl3 MFC set to  0.000000
6/26/2010	12:55:01 AM	SiCl4 MFC set to  0.000000
6/26/2010	12:55:01 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:55:01 AM	Tube furnace set to 0
6/26/2010	12:55:16 AM	Helium valve closed
6/26/2010	12:55:16 AM	H2 valve closed
6/26/2010	12:55:16 AM	BCl3 valve closed
6/26/2010	12:55:16 AM	PH3 valve closed
6/26/2010	12:55:16 AM	SiCl4 pre valve closed
6/26/2010	12:55:16 AM	SiCl4 post valve closed
6/26/2010	12:55:16 AM	Main Vac valve closed
6/26/2010	12:55:16 AM	Bubbler valve closed
6/26/2010	12:55:16 AM	Bypass valve opened
6/26/2010	12:55:16 AM	Helium MFC set to  0.000000
6/26/2010	12:55:16 AM	H2 MFC set to  0.000000
6/26/2010	12:55:16 AM	BCl3 MFC set to  0.000000
6/26/2010	12:55:16 AM	PHl3 MFC set to  0.000000
6/26/2010	12:55:16 AM	SiCl4 MFC set to  0.000000
6/26/2010	12:55:16 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:55:16 AM	Tube furnace set to 0
6/26/2010	12:56:02 AM	Helium valve closed
6/26/2010	12:56:02 AM	H2 valve closed
6/26/2010	12:56:02 AM	BCl3 valve closed
6/26/2010	12:56:02 AM	PH3 valve closed
6/26/2010	12:56:02 AM	SiCl4 pre valve closed
6/26/2010	12:56:02 AM	SiCl4 post valve closed
6/26/2010	12:56:02 AM	Bubbler valve closed
6/26/2010	12:56:02 AM	Main Vac valve opened
6/26/2010	12:56:02 AM	Bypass valve opened
6/26/2010	12:56:02 AM	Helium MFC set to  0.000000
6/26/2010	12:56:02 AM	H2 MFC set to  0.000000
6/26/2010	12:56:02 AM	BCl3 MFC set to  0.000000
6/26/2010	12:56:02 AM	PHl3 MFC set to  0.000000
6/26/2010	12:56:02 AM	SiCl4 MFC set to  0.000000
6/26/2010	12:56:02 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:56:02 AM	Tube furnace set to 0
6/26/2010	1:01:02 AM	H2 valve closed
6/26/2010	1:01:02 AM	BCl3 valve closed
6/26/2010	1:01:02 AM	PH3 valve closed
6/26/2010	1:01:02 AM	SiCl4 pre valve closed
6/26/2010	1:01:02 AM	SiCl4 post valve closed
6/26/2010	1:01:02 AM	Main Vac valve closed
6/26/2010	1:01:02 AM	Bypass valve closed
6/26/2010	1:01:02 AM	Bubbler valve closed
6/26/2010	1:01:02 AM	Helium valve opened
6/26/2010	1:01:02 AM	Helium MFC set to  500.000000
6/26/2010	1:01:02 AM	H2 MFC set to  0.000000
6/26/2010	1:01:02 AM	BCl3 MFC set to  0.000000
6/26/2010	1:01:02 AM	PHl3 MFC set to  0.000000
6/26/2010	1:01:02 AM	SiCl4 MFC set to  0.000000
6/26/2010	1:01:02 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:01:02 AM	Tube furnace set to 0
6/26/2010	1:02:20 AM	Helium valve closed
6/26/2010	1:02:20 AM	H2 valve closed
6/26/2010	1:02:20 AM	BCl3 valve closed
6/26/2010	1:02:20 AM	PH3 valve closed
6/26/2010	1:02:20 AM	SiCl4 pre valve closed
6/26/2010	1:02:20 AM	SiCl4 post valve closed
6/26/2010	1:02:20 AM	Main Vac valve closed
6/26/2010	1:02:20 AM	Bypass valve closed
6/26/2010	1:02:20 AM	Bubbler valve closed
6/26/2010	1:02:20 AM	Helium MFC set to  0.000000
6/26/2010	1:02:20 AM	H2 MFC set to  0.000000
6/26/2010	1:02:20 AM	BCl3 MFC set to  0.000000
6/26/2010	1:02:20 AM	PHl3 MFC set to  0.000000
6/26/2010	1:02:20 AM	SiCl4 MFC set to  0.000000
6/26/2010	1:02:20 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:02:20 AM	Tube furnace set to 0
6/26/2010	1:02:35 AM	Helium valve closed
6/26/2010	1:02:35 AM	H2 valve closed
6/26/2010	1:02:35 AM	BCl3 valve closed
6/26/2010	1:02:35 AM	PH3 valve closed
6/26/2010	1:02:35 AM	SiCl4 pre valve closed
6/26/2010	1:02:35 AM	SiCl4 post valve closed
6/26/2010	1:02:35 AM	Main Vac valve closed
6/26/2010	1:02:35 AM	Bubbler valve closed
6/26/2010	1:02:35 AM	Bypass valve opened
6/26/2010	1:02:35 AM	Helium MFC set to  0.000000
6/26/2010	1:02:35 AM	H2 MFC set to  0.000000
6/26/2010	1:02:35 AM	BCl3 MFC set to  0.000000
6/26/2010	1:02:35 AM	PHl3 MFC set to  0.000000
6/26/2010	1:02:35 AM	SiCl4 MFC set to  0.000000
6/26/2010	1:02:35 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:02:35 AM	Tube furnace set to 0
6/26/2010	1:03:07 AM	Helium valve closed
6/26/2010	1:03:07 AM	H2 valve closed
6/26/2010	1:03:07 AM	BCl3 valve closed
6/26/2010	1:03:07 AM	PH3 valve closed
6/26/2010	1:03:07 AM	SiCl4 pre valve closed
6/26/2010	1:03:07 AM	SiCl4 post valve closed
6/26/2010	1:03:07 AM	Bubbler valve closed
6/26/2010	1:03:07 AM	Main Vac valve opened
6/26/2010	1:03:07 AM	Bypass valve opened
6/26/2010	1:03:07 AM	Helium MFC set to  0.000000
6/26/2010	1:03:07 AM	H2 MFC set to  0.000000
6/26/2010	1:03:07 AM	BCl3 MFC set to  0.000000
6/26/2010	1:03:07 AM	PHl3 MFC set to  0.000000
6/26/2010	1:03:07 AM	SiCl4 MFC set to  0.000000
6/26/2010	1:03:07 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:03:07 AM	Tube furnace set to 0
6/26/2010	1:08:07 AM	H2 valve closed
6/26/2010	1:08:07 AM	BCl3 valve closed
6/26/2010	1:08:07 AM	PH3 valve closed
6/26/2010	1:08:07 AM	SiCl4 pre valve closed
6/26/2010	1:08:07 AM	SiCl4 post valve closed
6/26/2010	1:08:07 AM	Main Vac valve closed
6/26/2010	1:08:07 AM	Bypass valve closed
6/26/2010	1:08:07 AM	Bubbler valve closed
6/26/2010	1:08:07 AM	Helium valve opened
6/26/2010	1:08:07 AM	Helium MFC set to  500.000000
6/26/2010	1:08:07 AM	H2 MFC set to  0.000000
6/26/2010	1:08:07 AM	BCl3 MFC set to  0.000000
6/26/2010	1:08:07 AM	PHl3 MFC set to  0.000000
6/26/2010	1:08:07 AM	SiCl4 MFC set to  0.000000
6/26/2010	1:08:07 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:08:07 AM	Tube furnace set to 0
6/26/2010	1:09:24 AM	Helium valve closed
6/26/2010	1:09:24 AM	H2 valve closed
6/26/2010	1:09:24 AM	BCl3 valve closed
6/26/2010	1:09:24 AM	PH3 valve closed
6/26/2010	1:09:24 AM	SiCl4 pre valve closed
6/26/2010	1:09:24 AM	SiCl4 post valve closed
6/26/2010	1:09:24 AM	Main Vac valve closed
6/26/2010	1:09:24 AM	Bypass valve closed
6/26/2010	1:09:24 AM	Bubbler valve closed
6/26/2010	1:09:24 AM	Helium MFC set to  0.000000
6/26/2010	1:09:24 AM	H2 MFC set to  0.000000
6/26/2010	1:09:24 AM	BCl3 MFC set to  0.000000
6/26/2010	1:09:24 AM	PHl3 MFC set to  0.000000
6/26/2010	1:09:24 AM	SiCl4 MFC set to  0.000000
6/26/2010	1:09:24 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:09:25 AM	Tube furnace set to 0
6/26/2010	1:09:40 AM	Helium valve closed
6/26/2010	1:09:40 AM	H2 valve closed
6/26/2010	1:09:40 AM	BCl3 valve closed
6/26/2010	1:09:40 AM	PH3 valve closed
6/26/2010	1:09:40 AM	SiCl4 pre valve closed
6/26/2010	1:09:40 AM	SiCl4 post valve closed
6/26/2010	1:09:40 AM	Main Vac valve closed
6/26/2010	1:09:40 AM	Bubbler valve closed
6/26/2010	1:09:40 AM	Bypass valve opened
6/26/2010	1:09:40 AM	Helium MFC set to  0.000000
6/26/2010	1:09:40 AM	H2 MFC set to  0.000000
6/26/2010	1:09:40 AM	BCl3 MFC set to  0.000000
6/26/2010	1:09:40 AM	PHl3 MFC set to  0.000000
6/26/2010	1:09:40 AM	SiCl4 MFC set to  0.000000
6/26/2010	1:09:40 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:09:40 AM	Tube furnace set to 0
6/26/2010	1:10:12 AM	Helium valve closed
6/26/2010	1:10:12 AM	H2 valve closed
6/26/2010	1:10:12 AM	BCl3 valve closed
6/26/2010	1:10:12 AM	PH3 valve closed
6/26/2010	1:10:12 AM	SiCl4 pre valve closed
6/26/2010	1:10:12 AM	SiCl4 post valve closed
6/26/2010	1:10:12 AM	Bubbler valve closed
6/26/2010	1:10:12 AM	Main Vac valve opened
6/26/2010	1:10:12 AM	Bypass valve opened
6/26/2010	1:10:12 AM	Helium MFC set to  0.000000
6/26/2010	1:10:12 AM	H2 MFC set to  0.000000
6/26/2010	1:10:12 AM	BCl3 MFC set to  0.000000
6/26/2010	1:10:12 AM	PHl3 MFC set to  0.000000
6/26/2010	1:10:12 AM	SiCl4 MFC set to  0.000000
6/26/2010	1:10:12 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:10:12 AM	Tube furnace set to 0
6/26/2010	1:14:50 AM	Helium valve closed
6/26/2010	1:14:50 AM	H2 valve closed
6/26/2010	1:14:50 AM	BCl3 valve closed
6/26/2010	1:14:50 AM	PH3 valve closed
6/26/2010	1:14:51 AM	SiCl4 pre valve closed
6/26/2010	1:14:51 AM	SiCl4 post valve closed
6/26/2010	1:14:51 AM	Bubbler valve closed
6/26/2010	1:14:51 AM	Main Vac valve opened
6/26/2010	1:14:51 AM	Bypass valve opened
6/26/2010	1:14:51 AM	Helium MFC set to  0.000000
6/26/2010	1:14:51 AM	H2 MFC set to  0.000000
6/26/2010	1:14:51 AM	BCl3 MFC set to  0.000000
6/26/2010	1:14:51 AM	PHl3 MFC set to  0.000000
6/26/2010	1:14:51 AM	SiCl4 MFC set to  0.000000
6/26/2010	1:14:51 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:14:51 AM	Tube furnace set to 0
6/26/2010	1:14:52 AM	Run finished at 1:14 AM
6/26/2010	1:14:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/26/2010	1:14:58 AM	Helium MFC set to  100.000000
6/26/2010	1:15:00 AM	Helium valve opened
6/26/2010	1:19:38 AM	Helium valve closed
6/26/2010	1:19:41 AM	Helium MFC set to  0.000000
6/26/2010	1:20:13 AM	Helium MFC set to  100.000000
6/26/2010	1:20:15 AM	Helium valve opened
6/26/2010	1:38:46 AM	Helium valve closed
6/26/2010	1:38:49 AM	Helium MFC set to  0.000000
6/26/2010	1:39:30 AM	Helium MFC set to  100.000000
6/26/2010	1:39:32 AM	Helium valve opened
6/26/2010	1:56:41 AM	Helium valve closed
6/26/2010	1:56:44 AM	Helium MFC set to  0.000000
6/26/2010	1:57:31 AM	Helium MFC set to  100.000000
6/26/2010	1:57:33 AM	Helium valve opened
6/26/2010	2:09:42 AM	Helium valve closed
6/26/2010	2:09:44 AM	Helium MFC set to  0.000000
6/26/2010	2:10:45 AM	Bypass valve closed
6/26/2010	2:10:46 AM	Main Vac valve closed
6/26/2010	2:10:53 AM	Main Vac valve opened
6/26/2010	2:10:54 AM	Bypass valve opened
6/26/2010	2:11:12 AM	Recipe started at 2:11 AM
6/26/2010	2:11:12 AM	Helium valve closed
6/26/2010	2:11:12 AM	BCl3 valve closed
6/26/2010	2:11:12 AM	PH3 valve closed
6/26/2010	2:11:12 AM	SiCl4 pre valve closed
6/26/2010	2:11:12 AM	SiCl4 post valve closed
6/26/2010	2:11:12 AM	Main Vac valve closed
6/26/2010	2:11:12 AM	Bypass valve closed
6/26/2010	2:11:12 AM	Bubbler valve closed
6/26/2010	2:11:12 AM	H2 valve opened
6/26/2010	2:11:12 AM	Helium MFC set to  0.000000
6/26/2010	2:11:12 AM	H2 MFC set to  500.000000
6/26/2010	2:11:12 AM	BCl3 MFC set to  0.000000
6/26/2010	2:11:12 AM	PHl3 MFC set to  0.000000
6/26/2010	2:11:12 AM	SiCl4 MFC set to  0.000000
6/26/2010	2:11:12 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	2:11:12 AM	Tube furnace set to 0
6/26/2010	2:12:30 AM	Helium valve closed
6/26/2010	2:12:30 AM	BCl3 valve closed
6/26/2010	2:12:30 AM	PH3 valve closed
6/26/2010	2:12:30 AM	SiCl4 pre valve closed
6/26/2010	2:12:30 AM	SiCl4 post valve closed
6/26/2010	2:12:30 AM	Main Vac valve closed
6/26/2010	2:12:30 AM	Bypass valve closed
6/26/2010	2:12:30 AM	H2 valve opened
6/26/2010	2:12:30 AM	Bubbler valve opened
6/26/2010	2:12:30 AM	Helium MFC set to  0.000000
6/26/2010	2:12:30 AM	H2 MFC set to  500.000000
6/26/2010	2:12:30 AM	BCl3 MFC set to  0.000000
6/26/2010	2:12:30 AM	PHl3 MFC set to  0.000000
6/26/2010	2:12:30 AM	SiCl4 MFC set to  0.000000
6/26/2010	2:12:30 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	2:12:31 AM	Tube furnace set to 1000
6/26/2010	2:32:31 AM	Helium valve closed
6/26/2010	2:32:31 AM	PH3 valve closed
6/26/2010	2:32:31 AM	Main Vac valve closed
6/26/2010	2:32:31 AM	Bypass valve closed
6/26/2010	2:32:31 AM	H2 valve opened
6/26/2010	2:32:31 AM	BCl3 valve opened
6/26/2010	2:32:31 AM	SiCl4 pre valve opened
6/26/2010	2:32:31 AM	SiCl4 post valve opened
6/26/2010	2:32:31 AM	Bubbler valve opened
6/26/2010	2:32:31 AM	Helium MFC set to  0.000000
6/26/2010	2:32:31 AM	H2 MFC set to  500.000000
6/26/2010	2:32:31 AM	BCl3 MFC set to  35.000000
6/26/2010	2:32:31 AM	PHl3 MFC set to  0.000000
6/26/2010	2:32:31 AM	SiCl4 MFC set to  50.000000
6/26/2010	2:32:31 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	2:32:31 AM	Tube furnace set to 1000
6/26/2010	2:52:31 AM	H2 valve closed
6/26/2010	2:52:31 AM	BCl3 valve closed
6/26/2010	2:52:31 AM	PH3 valve closed
6/26/2010	2:52:31 AM	SiCl4 pre valve closed
6/26/2010	2:52:31 AM	SiCl4 post valve closed
6/26/2010	2:52:31 AM	Main Vac valve closed
6/26/2010	2:52:31 AM	Bypass valve closed
6/26/2010	2:52:31 AM	Helium valve opened
6/26/2010	2:52:31 AM	Bubbler valve opened
6/26/2010	2:52:31 AM	Helium MFC set to  500.000000
6/26/2010	2:52:31 AM	H2 MFC set to  0.000000
6/26/2010	2:52:31 AM	BCl3 MFC set to  0.000000
6/26/2010	2:52:31 AM	PHl3 MFC set to  0.000000
6/26/2010	2:52:31 AM	SiCl4 MFC set to  0.000000
6/26/2010	2:52:31 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	2:52:31 AM	Tube furnace set to 0
6/26/2010	3:12:31 AM	Helium valve closed
6/26/2010	3:12:31 AM	H2 valve closed
6/26/2010	3:12:31 AM	BCl3 valve closed
6/26/2010	3:12:31 AM	PH3 valve closed
6/26/2010	3:12:31 AM	SiCl4 pre valve closed
6/26/2010	3:12:31 AM	SiCl4 post valve closed
6/26/2010	3:12:31 AM	Main Vac valve closed
6/26/2010	3:12:31 AM	Bypass valve closed
6/26/2010	3:12:31 AM	Bubbler valve closed
6/26/2010	3:12:31 AM	Helium MFC set to  0.000000
6/26/2010	3:12:31 AM	H2 MFC set to  0.000000
6/26/2010	3:12:31 AM	BCl3 MFC set to  0.000000
6/26/2010	3:12:31 AM	PHl3 MFC set to  0.000000
6/26/2010	3:12:31 AM	SiCl4 MFC set to  0.000000
6/26/2010	3:12:31 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:12:31 AM	Tube furnace set to 0
6/26/2010	3:12:31 AM	Run finished at 3:12 AM
6/26/2010	3:17:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2010	3:17:13 AM	Recipe started at 3:17 AM
6/26/2010	3:17:13 AM	Helium valve closed
6/26/2010	3:17:13 AM	H2 valve closed
6/26/2010	3:17:13 AM	BCl3 valve closed
6/26/2010	3:17:13 AM	PH3 valve closed
6/26/2010	3:17:13 AM	SiCl4 pre valve closed
6/26/2010	3:17:13 AM	SiCl4 post valve closed
6/26/2010	3:17:13 AM	Main Vac valve closed
6/26/2010	3:17:13 AM	Bubbler valve closed
6/26/2010	3:17:13 AM	Bypass valve opened
6/26/2010	3:17:13 AM	Helium MFC set to  0.000000
6/26/2010	3:17:13 AM	H2 MFC set to  0.000000
6/26/2010	3:17:13 AM	BCl3 MFC set to  0.000000
6/26/2010	3:17:13 AM	PHl3 MFC set to  0.000000
6/26/2010	3:17:13 AM	SiCl4 MFC set to  0.000000
6/26/2010	3:17:13 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:17:13 AM	Tube furnace set to 0
6/26/2010	3:18:01 AM	Helium valve closed
6/26/2010	3:18:01 AM	H2 valve closed
6/26/2010	3:18:01 AM	BCl3 valve closed
6/26/2010	3:18:01 AM	PH3 valve closed
6/26/2010	3:18:01 AM	SiCl4 pre valve closed
6/26/2010	3:18:01 AM	SiCl4 post valve closed
6/26/2010	3:18:01 AM	Bubbler valve closed
6/26/2010	3:18:01 AM	Main Vac valve opened
6/26/2010	3:18:01 AM	Bypass valve opened
6/26/2010	3:18:01 AM	Helium MFC set to  0.000000
6/26/2010	3:18:01 AM	H2 MFC set to  0.000000
6/26/2010	3:18:01 AM	BCl3 MFC set to  0.000000
6/26/2010	3:18:01 AM	PHl3 MFC set to  0.000000
6/26/2010	3:18:01 AM	SiCl4 MFC set to  0.000000
6/26/2010	3:18:01 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:18:02 AM	Tube furnace set to 0
6/26/2010	3:18:02 AM	Run finished at 3:18 AM
6/26/2010	3:18:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2010	11:50:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2010	11:50:23 AM	Recipe started at 11:50 AM
6/26/2010	11:50:23 AM	H2 valve closed
6/26/2010	11:50:23 AM	BCl3 valve closed
6/26/2010	11:50:23 AM	PH3 valve closed
6/26/2010	11:50:23 AM	SiCl4 pre valve closed
6/26/2010	11:50:23 AM	SiCl4 post valve closed
6/26/2010	11:50:23 AM	Main Vac valve closed
6/26/2010	11:50:23 AM	Bypass valve closed
6/26/2010	11:50:23 AM	Bubbler valve closed
6/26/2010	11:50:23 AM	Helium valve opened
6/26/2010	11:50:23 AM	Helium MFC set to  500.000000
6/26/2010	11:50:23 AM	H2 MFC set to  0.000000
6/26/2010	11:50:23 AM	BCl3 MFC set to  0.000000
6/26/2010	11:50:23 AM	PHl3 MFC set to  0.000000
6/26/2010	11:50:23 AM	SiCl4 MFC set to  0.000000
6/26/2010	11:50:23 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	11:50:24 AM	Tube furnace set to 0
6/26/2010	11:51:43 AM	Helium valve closed
6/26/2010	11:51:43 AM	H2 valve closed
6/26/2010	11:51:43 AM	BCl3 valve closed
6/26/2010	11:51:43 AM	PH3 valve closed
6/26/2010	11:51:43 AM	SiCl4 pre valve closed
6/26/2010	11:51:43 AM	SiCl4 post valve closed
6/26/2010	11:51:43 AM	Main Vac valve closed
6/26/2010	11:51:43 AM	Bypass valve closed
6/26/2010	11:51:43 AM	Bubbler valve closed
6/26/2010	11:51:43 AM	Helium MFC set to  0.000000
6/26/2010	11:51:43 AM	H2 MFC set to  0.000000
6/26/2010	11:51:43 AM	BCl3 MFC set to  0.000000
6/26/2010	11:51:43 AM	PHl3 MFC set to  0.000000
6/26/2010	11:51:43 AM	SiCl4 MFC set to  0.000000
6/26/2010	11:51:43 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	11:51:44 AM	Tube furnace set to 0
6/26/2010	11:51:44 AM	Run finished at 11:51 AM
6/26/2010	11:51:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2010	11:57:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2010	11:57:51 AM	Recipe started at 11:57 AM
6/26/2010	11:57:51 AM	Helium valve closed
6/26/2010	11:57:51 AM	H2 valve closed
6/26/2010	11:57:51 AM	BCl3 valve closed
6/26/2010	11:57:51 AM	PH3 valve closed
6/26/2010	11:57:51 AM	SiCl4 pre valve closed
6/26/2010	11:57:51 AM	SiCl4 post valve closed
6/26/2010	11:57:51 AM	Main Vac valve closed
6/26/2010	11:57:51 AM	Bubbler valve closed
6/26/2010	11:57:51 AM	Bypass valve opened
6/26/2010	11:57:51 AM	Helium MFC set to  0.000000
6/26/2010	11:57:51 AM	H2 MFC set to  0.000000
6/26/2010	11:57:51 AM	BCl3 MFC set to  0.000000
6/26/2010	11:57:51 AM	PHl3 MFC set to  0.000000
6/26/2010	11:57:51 AM	SiCl4 MFC set to  0.000000
6/26/2010	11:57:51 AM	Bypass solenoid MFC set to  0.000000
6/26/2010	11:57:51 AM	Tube furnace set to 0
6/26/2010	11:58:02 AM	Run aborted at 11:58 AM
6/26/2010	11:58:02 AM	Helium valve closed
6/26/2010	11:58:02 AM	H2 valve closed
6/26/2010	11:58:02 AM	BCl3 valve closed
6/26/2010	11:58:02 AM	PH3 valve closed
6/26/2010	11:58:02 AM	SiCl4 pre valve closed
6/26/2010	11:58:02 AM	SiCl4 post valve closed
6/26/2010	11:58:02 AM	Bypass valve closed
6/26/2010	11:58:02 AM	Main Vac valve closed
6/26/2010	11:58:02 AM	Bubbler valve closed
6/26/2010	11:58:02 AM	Helium MFC set to  0.000000
6/26/2010	11:58:02 AM	H2 MFC set to  0.000000
6/26/2010	11:58:02 AM	BCl3 MFC set to  0.000000
6/26/2010	11:58:02 AM	PHl3 MFC set to  0.000000
6/26/2010	11:58:02 AM	SiCl4 MFC set to  0.000000
6/26/2010	11:58:02 AM	Tube furnace set to 0
6/26/2010	11:58:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2010	12:03:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2010	12:03:33 PM	Recipe started at 12:03 PM
6/26/2010	12:03:33 PM	Helium valve closed
6/26/2010	12:03:33 PM	H2 valve closed
6/26/2010	12:03:33 PM	BCl3 valve closed
6/26/2010	12:03:33 PM	PH3 valve closed
6/26/2010	12:03:33 PM	SiCl4 pre valve closed
6/26/2010	12:03:33 PM	SiCl4 post valve closed
6/26/2010	12:03:33 PM	Main Vac valve closed
6/26/2010	12:03:33 PM	Bubbler valve closed
6/26/2010	12:03:33 PM	Bypass valve opened
6/26/2010	12:03:33 PM	Helium MFC set to  0.000000
6/26/2010	12:03:33 PM	H2 MFC set to  0.000000
6/26/2010	12:03:33 PM	BCl3 MFC set to  0.000000
6/26/2010	12:03:33 PM	PHl3 MFC set to  0.000000
6/26/2010	12:03:33 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:03:33 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:03:34 PM	Tube furnace set to 0
6/26/2010	12:04:26 PM	Helium valve closed
6/26/2010	12:04:26 PM	H2 valve closed
6/26/2010	12:04:26 PM	BCl3 valve closed
6/26/2010	12:04:26 PM	PH3 valve closed
6/26/2010	12:04:26 PM	SiCl4 pre valve closed
6/26/2010	12:04:26 PM	SiCl4 post valve closed
6/26/2010	12:04:26 PM	Bubbler valve closed
6/26/2010	12:04:26 PM	Main Vac valve opened
6/26/2010	12:04:26 PM	Bypass valve opened
6/26/2010	12:04:26 PM	Helium MFC set to  0.000000
6/26/2010	12:04:26 PM	H2 MFC set to  0.000000
6/26/2010	12:04:26 PM	BCl3 MFC set to  0.000000
6/26/2010	12:04:26 PM	PHl3 MFC set to  0.000000
6/26/2010	12:04:26 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:04:26 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:04:26 PM	Tube furnace set to 0
6/26/2010	12:04:26 PM	Run finished at 12:04 PM
6/26/2010	12:04:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2010	12:05:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/26/2010	12:05:32 PM	Recipe started at 12:05 PM
6/26/2010	12:05:32 PM	H2 valve closed
6/26/2010	12:05:32 PM	BCl3 valve closed
6/26/2010	12:05:32 PM	PH3 valve closed
6/26/2010	12:05:32 PM	SiCl4 pre valve closed
6/26/2010	12:05:32 PM	SiCl4 post valve closed
6/26/2010	12:05:32 PM	Main Vac valve closed
6/26/2010	12:05:32 PM	Bypass valve closed
6/26/2010	12:05:32 PM	Bubbler valve closed
6/26/2010	12:05:32 PM	Helium valve opened
6/26/2010	12:05:32 PM	Helium MFC set to  500.000000
6/26/2010	12:05:32 PM	H2 MFC set to  0.000000
6/26/2010	12:05:32 PM	BCl3 MFC set to  0.000000
6/26/2010	12:05:32 PM	PHl3 MFC set to  0.000000
6/26/2010	12:05:32 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:05:32 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:05:32 PM	Tube furnace set to 0
6/26/2010	12:06:54 PM	Helium valve closed
6/26/2010	12:06:54 PM	H2 valve closed
6/26/2010	12:06:54 PM	BCl3 valve closed
6/26/2010	12:06:54 PM	PH3 valve closed
6/26/2010	12:06:54 PM	SiCl4 pre valve closed
6/26/2010	12:06:54 PM	SiCl4 post valve closed
6/26/2010	12:06:54 PM	Main Vac valve closed
6/26/2010	12:06:54 PM	Bypass valve closed
6/26/2010	12:06:54 PM	Bubbler valve closed
6/26/2010	12:06:54 PM	Helium MFC set to  0.000000
6/26/2010	12:06:54 PM	H2 MFC set to  0.000000
6/26/2010	12:06:54 PM	BCl3 MFC set to  0.000000
6/26/2010	12:06:54 PM	PHl3 MFC set to  0.000000
6/26/2010	12:06:54 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:06:54 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:06:54 PM	Tube furnace set to 0
6/26/2010	12:07:09 PM	Helium valve closed
6/26/2010	12:07:09 PM	H2 valve closed
6/26/2010	12:07:09 PM	BCl3 valve closed
6/26/2010	12:07:09 PM	PH3 valve closed
6/26/2010	12:07:09 PM	SiCl4 pre valve closed
6/26/2010	12:07:09 PM	SiCl4 post valve closed
6/26/2010	12:07:09 PM	Main Vac valve closed
6/26/2010	12:07:09 PM	Bubbler valve closed
6/26/2010	12:07:09 PM	Bypass valve opened
6/26/2010	12:07:09 PM	Helium MFC set to  0.000000
6/26/2010	12:07:09 PM	H2 MFC set to  0.000000
6/26/2010	12:07:09 PM	BCl3 MFC set to  0.000000
6/26/2010	12:07:09 PM	PHl3 MFC set to  0.000000
6/26/2010	12:07:09 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:07:09 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:07:09 PM	Tube furnace set to 0
6/26/2010	12:07:43 PM	Helium valve closed
6/26/2010	12:07:43 PM	H2 valve closed
6/26/2010	12:07:43 PM	BCl3 valve closed
6/26/2010	12:07:43 PM	PH3 valve closed
6/26/2010	12:07:43 PM	SiCl4 pre valve closed
6/26/2010	12:07:43 PM	SiCl4 post valve closed
6/26/2010	12:07:43 PM	Bubbler valve closed
6/26/2010	12:07:43 PM	Main Vac valve opened
6/26/2010	12:07:43 PM	Bypass valve opened
6/26/2010	12:07:43 PM	Helium MFC set to  0.000000
6/26/2010	12:07:43 PM	H2 MFC set to  0.000000
6/26/2010	12:07:43 PM	BCl3 MFC set to  0.000000
6/26/2010	12:07:43 PM	PHl3 MFC set to  0.000000
6/26/2010	12:07:43 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:07:43 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:07:43 PM	Tube furnace set to 0
6/26/2010	12:12:43 PM	H2 valve closed
6/26/2010	12:12:43 PM	BCl3 valve closed
6/26/2010	12:12:43 PM	PH3 valve closed
6/26/2010	12:12:43 PM	SiCl4 pre valve closed
6/26/2010	12:12:43 PM	SiCl4 post valve closed
6/26/2010	12:12:43 PM	Main Vac valve closed
6/26/2010	12:12:43 PM	Bypass valve closed
6/26/2010	12:12:43 PM	Bubbler valve closed
6/26/2010	12:12:43 PM	Helium valve opened
6/26/2010	12:12:43 PM	Helium MFC set to  500.000000
6/26/2010	12:12:43 PM	H2 MFC set to  0.000000
6/26/2010	12:12:43 PM	BCl3 MFC set to  0.000000
6/26/2010	12:12:43 PM	PHl3 MFC set to  0.000000
6/26/2010	12:12:43 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:12:43 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:12:43 PM	Tube furnace set to 0
6/26/2010	12:14:05 PM	Helium valve closed
6/26/2010	12:14:05 PM	H2 valve closed
6/26/2010	12:14:05 PM	BCl3 valve closed
6/26/2010	12:14:05 PM	PH3 valve closed
6/26/2010	12:14:05 PM	SiCl4 pre valve closed
6/26/2010	12:14:05 PM	SiCl4 post valve closed
6/26/2010	12:14:05 PM	Main Vac valve closed
6/26/2010	12:14:05 PM	Bypass valve closed
6/26/2010	12:14:05 PM	Bubbler valve closed
6/26/2010	12:14:05 PM	Helium MFC set to  0.000000
6/26/2010	12:14:05 PM	H2 MFC set to  0.000000
6/26/2010	12:14:05 PM	BCl3 MFC set to  0.000000
6/26/2010	12:14:05 PM	PHl3 MFC set to  0.000000
6/26/2010	12:14:05 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:14:05 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:14:05 PM	Tube furnace set to 0
6/26/2010	12:14:20 PM	Helium valve closed
6/26/2010	12:14:20 PM	H2 valve closed
6/26/2010	12:14:20 PM	BCl3 valve closed
6/26/2010	12:14:20 PM	PH3 valve closed
6/26/2010	12:14:20 PM	SiCl4 pre valve closed
6/26/2010	12:14:20 PM	SiCl4 post valve closed
6/26/2010	12:14:20 PM	Main Vac valve closed
6/26/2010	12:14:21 PM	Bubbler valve closed
6/26/2010	12:14:21 PM	Bypass valve opened
6/26/2010	12:14:21 PM	Helium MFC set to  0.000000
6/26/2010	12:14:21 PM	H2 MFC set to  0.000000
6/26/2010	12:14:21 PM	BCl3 MFC set to  0.000000
6/26/2010	12:14:21 PM	PHl3 MFC set to  0.000000
6/26/2010	12:14:21 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:14:21 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:14:21 PM	Tube furnace set to 0
6/26/2010	12:14:55 PM	Helium valve closed
6/26/2010	12:14:55 PM	H2 valve closed
6/26/2010	12:14:55 PM	BCl3 valve closed
6/26/2010	12:14:55 PM	PH3 valve closed
6/26/2010	12:14:55 PM	SiCl4 pre valve closed
6/26/2010	12:14:55 PM	SiCl4 post valve closed
6/26/2010	12:14:55 PM	Bubbler valve closed
6/26/2010	12:14:55 PM	Main Vac valve opened
6/26/2010	12:14:55 PM	Bypass valve opened
6/26/2010	12:14:55 PM	Helium MFC set to  0.000000
6/26/2010	12:14:55 PM	H2 MFC set to  0.000000
6/26/2010	12:14:55 PM	BCl3 MFC set to  0.000000
6/26/2010	12:14:55 PM	PHl3 MFC set to  0.000000
6/26/2010	12:14:55 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:14:55 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:14:55 PM	Tube furnace set to 0
6/26/2010	12:19:55 PM	H2 valve closed
6/26/2010	12:19:55 PM	BCl3 valve closed
6/26/2010	12:19:55 PM	PH3 valve closed
6/26/2010	12:19:55 PM	SiCl4 pre valve closed
6/26/2010	12:19:55 PM	SiCl4 post valve closed
6/26/2010	12:19:55 PM	Main Vac valve closed
6/26/2010	12:19:55 PM	Bypass valve closed
6/26/2010	12:19:55 PM	Bubbler valve closed
6/26/2010	12:19:55 PM	Helium valve opened
6/26/2010	12:19:55 PM	Helium MFC set to  500.000000
6/26/2010	12:19:55 PM	H2 MFC set to  0.000000
6/26/2010	12:19:55 PM	BCl3 MFC set to  0.000000
6/26/2010	12:19:55 PM	PHl3 MFC set to  0.000000
6/26/2010	12:19:55 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:19:55 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:19:55 PM	Tube furnace set to 0
6/26/2010	12:21:17 PM	Helium valve closed
6/26/2010	12:21:17 PM	H2 valve closed
6/26/2010	12:21:17 PM	BCl3 valve closed
6/26/2010	12:21:17 PM	PH3 valve closed
6/26/2010	12:21:17 PM	SiCl4 pre valve closed
6/26/2010	12:21:17 PM	SiCl4 post valve closed
6/26/2010	12:21:17 PM	Main Vac valve closed
6/26/2010	12:21:17 PM	Bypass valve closed
6/26/2010	12:21:17 PM	Bubbler valve closed
6/26/2010	12:21:17 PM	Helium MFC set to  0.000000
6/26/2010	12:21:17 PM	H2 MFC set to  0.000000
6/26/2010	12:21:17 PM	BCl3 MFC set to  0.000000
6/26/2010	12:21:17 PM	PHl3 MFC set to  0.000000
6/26/2010	12:21:17 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:21:17 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:21:17 PM	Tube furnace set to 0
6/26/2010	12:21:32 PM	Helium valve closed
6/26/2010	12:21:32 PM	H2 valve closed
6/26/2010	12:21:32 PM	BCl3 valve closed
6/26/2010	12:21:32 PM	PH3 valve closed
6/26/2010	12:21:32 PM	SiCl4 pre valve closed
6/26/2010	12:21:32 PM	SiCl4 post valve closed
6/26/2010	12:21:32 PM	Main Vac valve closed
6/26/2010	12:21:32 PM	Bubbler valve closed
6/26/2010	12:21:32 PM	Bypass valve opened
6/26/2010	12:21:32 PM	Helium MFC set to  0.000000
6/26/2010	12:21:32 PM	H2 MFC set to  0.000000
6/26/2010	12:21:32 PM	BCl3 MFC set to  0.000000
6/26/2010	12:21:32 PM	PHl3 MFC set to  0.000000
6/26/2010	12:21:32 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:21:32 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:21:32 PM	Tube furnace set to 0
6/26/2010	12:22:06 PM	Helium valve closed
6/26/2010	12:22:06 PM	H2 valve closed
6/26/2010	12:22:06 PM	BCl3 valve closed
6/26/2010	12:22:06 PM	PH3 valve closed
6/26/2010	12:22:06 PM	SiCl4 pre valve closed
6/26/2010	12:22:06 PM	SiCl4 post valve closed
6/26/2010	12:22:06 PM	Bubbler valve closed
6/26/2010	12:22:06 PM	Main Vac valve opened
6/26/2010	12:22:06 PM	Bypass valve opened
6/26/2010	12:22:06 PM	Helium MFC set to  0.000000
6/26/2010	12:22:06 PM	H2 MFC set to  0.000000
6/26/2010	12:22:06 PM	BCl3 MFC set to  0.000000
6/26/2010	12:22:06 PM	PHl3 MFC set to  0.000000
6/26/2010	12:22:06 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:22:06 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:22:07 PM	Tube furnace set to 0
6/26/2010	12:27:07 PM	Helium valve closed
6/26/2010	12:27:07 PM	H2 valve closed
6/26/2010	12:27:07 PM	BCl3 valve closed
6/26/2010	12:27:07 PM	PH3 valve closed
6/26/2010	12:27:07 PM	SiCl4 pre valve closed
6/26/2010	12:27:07 PM	SiCl4 post valve closed
6/26/2010	12:27:07 PM	Bubbler valve closed
6/26/2010	12:27:07 PM	Main Vac valve opened
6/26/2010	12:27:07 PM	Bypass valve opened
6/26/2010	12:27:07 PM	Helium MFC set to  0.000000
6/26/2010	12:27:07 PM	H2 MFC set to  0.000000
6/26/2010	12:27:07 PM	BCl3 MFC set to  0.000000
6/26/2010	12:27:07 PM	PHl3 MFC set to  0.000000
6/26/2010	12:27:07 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:27:07 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:27:07 PM	Tube furnace set to 0
6/26/2010	12:27:08 PM	Run finished at 12:27 PM
6/26/2010	12:27:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/26/2010	12:46:40 PM	Recipe started at 12:46 PM
6/26/2010	12:46:40 PM	H2 valve closed
6/26/2010	12:46:40 PM	BCl3 valve closed
6/26/2010	12:46:40 PM	PH3 valve closed
6/26/2010	12:46:40 PM	SiCl4 pre valve closed
6/26/2010	12:46:40 PM	SiCl4 post valve closed
6/26/2010	12:46:40 PM	Bubbler valve closed
6/26/2010	12:46:40 PM	Helium valve opened
6/26/2010	12:46:40 PM	Main Vac valve opened
6/26/2010	12:46:40 PM	Bypass valve opened
6/26/2010	12:46:40 PM	Helium MFC set to  100.000000
6/26/2010	12:46:40 PM	H2 MFC set to  0.000000
6/26/2010	12:46:40 PM	BCl3 MFC set to  0.000000
6/26/2010	12:46:40 PM	PHl3 MFC set to  0.000000
6/26/2010	12:46:40 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:46:40 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:46:40 PM	Tube furnace set to 0
6/26/2010	12:48:40 PM	Helium valve closed
6/26/2010	12:48:40 PM	H2 valve closed
6/26/2010	12:48:40 PM	BCl3 valve closed
6/26/2010	12:48:40 PM	PH3 valve closed
6/26/2010	12:48:40 PM	SiCl4 pre valve closed
6/26/2010	12:48:40 PM	SiCl4 post valve closed
6/26/2010	12:48:40 PM	Bubbler valve closed
6/26/2010	12:48:40 PM	Main Vac valve opened
6/26/2010	12:48:40 PM	Bypass valve opened
6/26/2010	12:48:40 PM	Helium MFC set to  0.000000
6/26/2010	12:48:40 PM	H2 MFC set to  0.000000
6/26/2010	12:48:40 PM	BCl3 MFC set to  0.000000
6/26/2010	12:48:40 PM	PHl3 MFC set to  0.000000
6/26/2010	12:48:40 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:48:40 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:48:40 PM	Tube furnace set to 0
6/26/2010	12:53:40 PM	H2 valve closed
6/26/2010	12:53:40 PM	BCl3 valve closed
6/26/2010	12:53:40 PM	PH3 valve closed
6/26/2010	12:53:40 PM	SiCl4 pre valve closed
6/26/2010	12:53:40 PM	SiCl4 post valve closed
6/26/2010	12:53:40 PM	Bubbler valve closed
6/26/2010	12:53:40 PM	Helium valve opened
6/26/2010	12:53:40 PM	Main Vac valve opened
6/26/2010	12:53:40 PM	Bypass valve opened
6/26/2010	12:53:40 PM	Helium MFC set to  100.000000
6/26/2010	12:53:40 PM	H2 MFC set to  0.000000
6/26/2010	12:53:40 PM	BCl3 MFC set to  0.000000
6/26/2010	12:53:40 PM	PHl3 MFC set to  0.000000
6/26/2010	12:53:40 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:53:40 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:53:41 PM	Tube furnace set to 0
6/26/2010	12:55:41 PM	Helium valve closed
6/26/2010	12:55:41 PM	H2 valve closed
6/26/2010	12:55:41 PM	BCl3 valve closed
6/26/2010	12:55:41 PM	PH3 valve closed
6/26/2010	12:55:41 PM	SiCl4 pre valve closed
6/26/2010	12:55:41 PM	SiCl4 post valve closed
6/26/2010	12:55:41 PM	Bubbler valve closed
6/26/2010	12:55:41 PM	Main Vac valve opened
6/26/2010	12:55:41 PM	Bypass valve opened
6/26/2010	12:55:41 PM	Helium MFC set to  0.000000
6/26/2010	12:55:41 PM	H2 MFC set to  0.000000
6/26/2010	12:55:41 PM	BCl3 MFC set to  0.000000
6/26/2010	12:55:41 PM	PHl3 MFC set to  0.000000
6/26/2010	12:55:41 PM	SiCl4 MFC set to  0.000000
6/26/2010	12:55:41 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	12:55:41 PM	Tube furnace set to 0
6/26/2010	12:58:41 PM	Run finished at 12:58 PM
6/26/2010	1:14:35 PM	Recipe started at 1:14 PM
6/26/2010	1:14:35 PM	H2 valve closed
6/26/2010	1:14:35 PM	BCl3 valve closed
6/26/2010	1:14:35 PM	PH3 valve closed
6/26/2010	1:14:35 PM	SiCl4 pre valve closed
6/26/2010	1:14:35 PM	SiCl4 post valve closed
6/26/2010	1:14:35 PM	Bubbler valve closed
6/26/2010	1:14:35 PM	Helium valve opened
6/26/2010	1:14:35 PM	Main Vac valve opened
6/26/2010	1:14:35 PM	Bypass valve opened
6/26/2010	1:14:35 PM	Helium MFC set to  100.000000
6/26/2010	1:14:35 PM	H2 MFC set to  0.000000
6/26/2010	1:14:35 PM	BCl3 MFC set to  0.000000
6/26/2010	1:14:35 PM	PHl3 MFC set to  0.000000
6/26/2010	1:14:35 PM	SiCl4 MFC set to  0.000000
6/26/2010	1:14:35 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:14:36 PM	Tube furnace set to 30
6/26/2010	1:16:36 PM	Helium valve closed
6/26/2010	1:16:36 PM	H2 valve closed
6/26/2010	1:16:36 PM	BCl3 valve closed
6/26/2010	1:16:36 PM	PH3 valve closed
6/26/2010	1:16:36 PM	SiCl4 pre valve closed
6/26/2010	1:16:36 PM	SiCl4 post valve closed
6/26/2010	1:16:36 PM	Bubbler valve closed
6/26/2010	1:16:36 PM	Main Vac valve opened
6/26/2010	1:16:36 PM	Bypass valve opened
6/26/2010	1:16:36 PM	Helium MFC set to  0.000000
6/26/2010	1:16:36 PM	H2 MFC set to  0.000000
6/26/2010	1:16:36 PM	BCl3 MFC set to  0.000000
6/26/2010	1:16:36 PM	PHl3 MFC set to  0.000000
6/26/2010	1:16:36 PM	SiCl4 MFC set to  0.000000
6/26/2010	1:16:36 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:16:36 PM	Tube furnace set to 30
6/26/2010	1:18:01 PM	H2 valve closed
6/26/2010	1:18:01 PM	BCl3 valve closed
6/26/2010	1:18:01 PM	PH3 valve closed
6/26/2010	1:18:01 PM	SiCl4 pre valve closed
6/26/2010	1:18:01 PM	SiCl4 post valve closed
6/26/2010	1:18:01 PM	Bubbler valve closed
6/26/2010	1:18:01 PM	Helium valve opened
6/26/2010	1:18:01 PM	Main Vac valve opened
6/26/2010	1:18:01 PM	Bypass valve opened
6/26/2010	1:18:01 PM	Helium MFC set to  100.000000
6/26/2010	1:18:01 PM	H2 MFC set to  0.000000
6/26/2010	1:18:01 PM	BCl3 MFC set to  0.000000
6/26/2010	1:18:01 PM	PHl3 MFC set to  0.000000
6/26/2010	1:18:01 PM	SiCl4 MFC set to  0.000000
6/26/2010	1:18:01 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:18:01 PM	Tube furnace set to 30
6/26/2010	1:20:01 PM	Helium valve closed
6/26/2010	1:20:01 PM	H2 valve closed
6/26/2010	1:20:01 PM	BCl3 valve closed
6/26/2010	1:20:01 PM	PH3 valve closed
6/26/2010	1:20:01 PM	SiCl4 pre valve closed
6/26/2010	1:20:01 PM	SiCl4 post valve closed
6/26/2010	1:20:01 PM	Bubbler valve closed
6/26/2010	1:20:01 PM	Main Vac valve opened
6/26/2010	1:20:01 PM	Bypass valve opened
6/26/2010	1:20:01 PM	Helium MFC set to  0.000000
6/26/2010	1:20:01 PM	H2 MFC set to  0.000000
6/26/2010	1:20:01 PM	BCl3 MFC set to  0.000000
6/26/2010	1:20:01 PM	PHl3 MFC set to  0.000000
6/26/2010	1:20:01 PM	SiCl4 MFC set to  0.000000
6/26/2010	1:20:01 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:20:01 PM	Tube furnace set to 0
6/26/2010	1:20:38 PM	Run finished at 1:20 PM
6/26/2010	1:20:48 PM	Main Vac valve closed
6/26/2010	1:20:50 PM	Bypass valve closed
6/26/2010	1:21:02 PM	Bypass valve opened
6/26/2010	1:21:05 PM	Main Vac valve opened
6/26/2010	1:28:35 PM	Recipe started at 1:28 PM
6/26/2010	1:28:35 PM	Helium valve closed
6/26/2010	1:28:35 PM	BCl3 valve closed
6/26/2010	1:28:35 PM	PH3 valve closed
6/26/2010	1:28:35 PM	SiCl4 pre valve closed
6/26/2010	1:28:35 PM	SiCl4 post valve closed
6/26/2010	1:28:35 PM	Main Vac valve closed
6/26/2010	1:28:35 PM	Bypass valve closed
6/26/2010	1:28:35 PM	Bubbler valve closed
6/26/2010	1:28:35 PM	H2 valve opened
6/26/2010	1:28:35 PM	Helium MFC set to  0.000000
6/26/2010	1:28:35 PM	H2 MFC set to  500.000000
6/26/2010	1:28:35 PM	BCl3 MFC set to  0.000000
6/26/2010	1:28:35 PM	PHl3 MFC set to  0.000000
6/26/2010	1:28:35 PM	SiCl4 MFC set to  0.000000
6/26/2010	1:28:35 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:28:35 PM	Tube furnace set to 200
6/26/2010	1:29:56 PM	Helium valve closed
6/26/2010	1:29:56 PM	BCl3 valve closed
6/26/2010	1:29:56 PM	PH3 valve closed
6/26/2010	1:29:56 PM	SiCl4 pre valve closed
6/26/2010	1:29:56 PM	SiCl4 post valve closed
6/26/2010	1:29:56 PM	Main Vac valve closed
6/26/2010	1:29:56 PM	Bypass valve closed
6/26/2010	1:29:56 PM	H2 valve opened
6/26/2010	1:29:56 PM	Bubbler valve opened
6/26/2010	1:29:56 PM	Helium MFC set to  0.000000
6/26/2010	1:29:56 PM	H2 MFC set to  400.000000
6/26/2010	1:29:56 PM	BCl3 MFC set to  0.000000
6/26/2010	1:29:56 PM	PHl3 MFC set to  0.000000
6/26/2010	1:29:56 PM	SiCl4 MFC set to  0.000000
6/26/2010	1:29:56 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:29:56 PM	Tube furnace set to 1000
6/26/2010	1:49:56 PM	Helium valve closed
6/26/2010	1:49:56 PM	BCl3 valve closed
6/26/2010	1:49:56 PM	PH3 valve closed
6/26/2010	1:49:56 PM	Main Vac valve closed
6/26/2010	1:49:56 PM	Bypass valve closed
6/26/2010	1:49:56 PM	H2 valve opened
6/26/2010	1:49:56 PM	SiCl4 pre valve opened
6/26/2010	1:49:56 PM	SiCl4 post valve opened
6/26/2010	1:49:56 PM	Bubbler valve opened
6/26/2010	1:49:56 PM	Helium MFC set to  0.000000
6/26/2010	1:49:56 PM	H2 MFC set to  500.000000
6/26/2010	1:49:56 PM	BCl3 MFC set to  0.000000
6/26/2010	1:49:56 PM	PHl3 MFC set to  0.000000
6/26/2010	1:49:56 PM	SiCl4 MFC set to  50.000000
6/26/2010	1:49:56 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	1:49:56 PM	Tube furnace set to 1000
6/26/2010	2:09:56 PM	H2 valve closed
6/26/2010	2:09:56 PM	BCl3 valve closed
6/26/2010	2:09:56 PM	PH3 valve closed
6/26/2010	2:09:56 PM	SiCl4 pre valve closed
6/26/2010	2:09:56 PM	SiCl4 post valve closed
6/26/2010	2:09:56 PM	Main Vac valve closed
6/26/2010	2:09:56 PM	Bypass valve closed
6/26/2010	2:09:56 PM	Helium valve opened
6/26/2010	2:09:56 PM	Bubbler valve opened
6/26/2010	2:09:56 PM	Helium MFC set to  400.000000
6/26/2010	2:09:56 PM	H2 MFC set to  0.000000
6/26/2010	2:09:56 PM	BCl3 MFC set to  0.000000
6/26/2010	2:09:56 PM	PHl3 MFC set to  0.000000
6/26/2010	2:09:56 PM	SiCl4 MFC set to  0.000000
6/26/2010	2:09:56 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	2:09:57 PM	Tube furnace set to 0
6/26/2010	2:29:57 PM	Helium valve closed
6/26/2010	2:29:57 PM	H2 valve closed
6/26/2010	2:29:57 PM	BCl3 valve closed
6/26/2010	2:29:57 PM	PH3 valve closed
6/26/2010	2:29:57 PM	SiCl4 pre valve closed
6/26/2010	2:29:57 PM	SiCl4 post valve closed
6/26/2010	2:29:57 PM	Main Vac valve closed
6/26/2010	2:29:57 PM	Bypass valve closed
6/26/2010	2:29:57 PM	Bubbler valve closed
6/26/2010	2:29:57 PM	Helium MFC set to  0.000000
6/26/2010	2:29:57 PM	H2 MFC set to  0.000000
6/26/2010	2:29:57 PM	BCl3 MFC set to  0.000000
6/26/2010	2:29:57 PM	PHl3 MFC set to  0.000000
6/26/2010	2:29:57 PM	SiCl4 MFC set to  0.000000
6/26/2010	2:29:57 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	2:29:57 PM	Tube furnace set to 0
6/26/2010	2:29:57 PM	Run finished at 2:29 PM
6/26/2010	2:38:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2010	2:38:35 PM	Recipe started at 2:38 PM
6/26/2010	2:38:35 PM	H2 valve closed
6/26/2010	2:38:35 PM	BCl3 valve closed
6/26/2010	2:38:35 PM	PH3 valve closed
6/26/2010	2:38:35 PM	SiCl4 pre valve closed
6/26/2010	2:38:35 PM	SiCl4 post valve closed
6/26/2010	2:38:35 PM	Main Vac valve closed
6/26/2010	2:38:35 PM	Bypass valve closed
6/26/2010	2:38:35 PM	Bubbler valve closed
6/26/2010	2:38:35 PM	Helium valve opened
6/26/2010	2:38:35 PM	Helium MFC set to  500.000000
6/26/2010	2:38:35 PM	H2 MFC set to  0.000000
6/26/2010	2:38:35 PM	BCl3 MFC set to  0.000000
6/26/2010	2:38:35 PM	PHl3 MFC set to  0.000000
6/26/2010	2:38:35 PM	SiCl4 MFC set to  0.000000
6/26/2010	2:38:35 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	2:38:35 PM	Tube furnace set to 0
6/26/2010	2:38:37 PM	Helium valve closed
6/26/2010	2:38:37 PM	H2 valve closed
6/26/2010	2:38:37 PM	BCl3 valve closed
6/26/2010	2:38:37 PM	PH3 valve closed
6/26/2010	2:38:37 PM	SiCl4 pre valve closed
6/26/2010	2:38:37 PM	SiCl4 post valve closed
6/26/2010	2:38:37 PM	Main Vac valve closed
6/26/2010	2:38:37 PM	Bypass valve closed
6/26/2010	2:38:37 PM	Bubbler valve closed
6/26/2010	2:38:37 PM	Helium MFC set to  0.000000
6/26/2010	2:38:37 PM	H2 MFC set to  0.000000
6/26/2010	2:38:37 PM	BCl3 MFC set to  0.000000
6/26/2010	2:38:37 PM	PHl3 MFC set to  0.000000
6/26/2010	2:38:37 PM	SiCl4 MFC set to  0.000000
6/26/2010	2:38:37 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	2:38:37 PM	Tube furnace set to 0
6/26/2010	2:38:37 PM	Run finished at 2:38 PM
6/26/2010	2:38:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2010	2:43:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2010	2:43:12 PM	Recipe started at 2:43 PM
6/26/2010	2:43:12 PM	Helium valve closed
6/26/2010	2:43:12 PM	H2 valve closed
6/26/2010	2:43:12 PM	BCl3 valve closed
6/26/2010	2:43:12 PM	PH3 valve closed
6/26/2010	2:43:12 PM	SiCl4 pre valve closed
6/26/2010	2:43:12 PM	SiCl4 post valve closed
6/26/2010	2:43:12 PM	Main Vac valve closed
6/26/2010	2:43:12 PM	Bubbler valve closed
6/26/2010	2:43:12 PM	Bypass valve opened
6/26/2010	2:43:12 PM	Helium MFC set to  0.000000
6/26/2010	2:43:12 PM	H2 MFC set to  0.000000
6/26/2010	2:43:12 PM	BCl3 MFC set to  0.000000
6/26/2010	2:43:12 PM	PHl3 MFC set to  0.000000
6/26/2010	2:43:12 PM	SiCl4 MFC set to  0.000000
6/26/2010	2:43:12 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	2:43:12 PM	Tube furnace set to 0
6/26/2010	2:44:00 PM	Helium valve closed
6/26/2010	2:44:00 PM	H2 valve closed
6/26/2010	2:44:00 PM	BCl3 valve closed
6/26/2010	2:44:00 PM	PH3 valve closed
6/26/2010	2:44:00 PM	SiCl4 pre valve closed
6/26/2010	2:44:00 PM	SiCl4 post valve closed
6/26/2010	2:44:00 PM	Bubbler valve closed
6/26/2010	2:44:00 PM	Main Vac valve opened
6/26/2010	2:44:00 PM	Bypass valve opened
6/26/2010	2:44:00 PM	Helium MFC set to  0.000000
6/26/2010	2:44:00 PM	H2 MFC set to  0.000000
6/26/2010	2:44:00 PM	BCl3 MFC set to  0.000000
6/26/2010	2:44:00 PM	PHl3 MFC set to  0.000000
6/26/2010	2:44:00 PM	SiCl4 MFC set to  0.000000
6/26/2010	2:44:00 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	2:44:00 PM	Tube furnace set to 0
6/26/2010	2:44:00 PM	Run finished at 2:44 PM
6/26/2010	2:44:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2010	2:49:12 PM	Recipe started at 2:49 PM
6/26/2010	2:49:12 PM	H2 valve closed
6/26/2010	2:49:12 PM	BCl3 valve closed
6/26/2010	2:49:12 PM	PH3 valve closed
6/26/2010	2:49:12 PM	SiCl4 pre valve closed
6/26/2010	2:49:12 PM	SiCl4 post valve closed
6/26/2010	2:49:12 PM	Bubbler valve closed
6/26/2010	2:49:12 PM	Helium valve opened
6/26/2010	2:49:12 PM	Main Vac valve opened
6/26/2010	2:49:12 PM	Bypass valve opened
6/26/2010	2:49:12 PM	Helium MFC set to  100.000000
6/26/2010	2:49:12 PM	H2 MFC set to  0.000000
6/26/2010	2:49:12 PM	BCl3 MFC set to  0.000000
6/26/2010	2:49:12 PM	PHl3 MFC set to  0.000000
6/26/2010	2:49:12 PM	SiCl4 MFC set to  0.000000
6/26/2010	2:49:12 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	2:49:12 PM	Tube furnace set to 0
6/26/2010	2:51:12 PM	Helium valve closed
6/26/2010	2:51:12 PM	H2 valve closed
6/26/2010	2:51:12 PM	BCl3 valve closed
6/26/2010	2:51:12 PM	PH3 valve closed
6/26/2010	2:51:12 PM	SiCl4 pre valve closed
6/26/2010	2:51:12 PM	SiCl4 post valve closed
6/26/2010	2:51:12 PM	Bubbler valve closed
6/26/2010	2:51:12 PM	Main Vac valve opened
6/26/2010	2:51:12 PM	Bypass valve opened
6/26/2010	2:51:12 PM	Helium MFC set to  0.000000
6/26/2010	2:51:12 PM	H2 MFC set to  0.000000
6/26/2010	2:51:12 PM	BCl3 MFC set to  0.000000
6/26/2010	2:51:12 PM	PHl3 MFC set to  0.000000
6/26/2010	2:51:12 PM	SiCl4 MFC set to  0.000000
6/26/2010	2:51:12 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	2:51:12 PM	Tube furnace set to 0
6/26/2010	2:56:12 PM	H2 valve closed
6/26/2010	2:56:12 PM	BCl3 valve closed
6/26/2010	2:56:12 PM	PH3 valve closed
6/26/2010	2:56:12 PM	SiCl4 pre valve closed
6/26/2010	2:56:12 PM	SiCl4 post valve closed
6/26/2010	2:56:12 PM	Bubbler valve closed
6/26/2010	2:56:12 PM	Helium valve opened
6/26/2010	2:56:12 PM	Main Vac valve opened
6/26/2010	2:56:12 PM	Bypass valve opened
6/26/2010	2:56:12 PM	Helium MFC set to  100.000000
6/26/2010	2:56:12 PM	H2 MFC set to  0.000000
6/26/2010	2:56:12 PM	BCl3 MFC set to  0.000000
6/26/2010	2:56:12 PM	PHl3 MFC set to  0.000000
6/26/2010	2:56:12 PM	SiCl4 MFC set to  0.000000
6/26/2010	2:56:12 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	2:56:12 PM	Tube furnace set to 0
6/26/2010	2:58:12 PM	Helium valve closed
6/26/2010	2:58:12 PM	H2 valve closed
6/26/2010	2:58:12 PM	BCl3 valve closed
6/26/2010	2:58:12 PM	PH3 valve closed
6/26/2010	2:58:12 PM	SiCl4 pre valve closed
6/26/2010	2:58:12 PM	SiCl4 post valve closed
6/26/2010	2:58:12 PM	Bubbler valve closed
6/26/2010	2:58:12 PM	Main Vac valve opened
6/26/2010	2:58:12 PM	Bypass valve opened
6/26/2010	2:58:12 PM	Helium MFC set to  0.000000
6/26/2010	2:58:12 PM	H2 MFC set to  0.000000
6/26/2010	2:58:12 PM	BCl3 MFC set to  0.000000
6/26/2010	2:58:12 PM	PHl3 MFC set to  0.000000
6/26/2010	2:58:12 PM	SiCl4 MFC set to  0.000000
6/26/2010	2:58:12 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	2:58:13 PM	Tube furnace set to 0
6/26/2010	3:01:13 PM	Run finished at 3:01 PM
6/26/2010	3:02:31 PM	Recipe started at 3:02 PM
6/26/2010	3:02:31 PM	H2 valve closed
6/26/2010	3:02:31 PM	BCl3 valve closed
6/26/2010	3:02:31 PM	PH3 valve closed
6/26/2010	3:02:31 PM	SiCl4 pre valve closed
6/26/2010	3:02:31 PM	SiCl4 post valve closed
6/26/2010	3:02:31 PM	Bubbler valve closed
6/26/2010	3:02:31 PM	Helium valve opened
6/26/2010	3:02:31 PM	Main Vac valve opened
6/26/2010	3:02:31 PM	Bypass valve opened
6/26/2010	3:02:31 PM	Helium MFC set to  100.000000
6/26/2010	3:02:31 PM	H2 MFC set to  0.000000
6/26/2010	3:02:31 PM	BCl3 MFC set to  0.000000
6/26/2010	3:02:31 PM	PHl3 MFC set to  0.000000
6/26/2010	3:02:31 PM	SiCl4 MFC set to  0.000000
6/26/2010	3:02:31 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:02:31 PM	Tube furnace set to 0
6/26/2010	3:04:31 PM	Helium valve closed
6/26/2010	3:04:31 PM	H2 valve closed
6/26/2010	3:04:31 PM	BCl3 valve closed
6/26/2010	3:04:31 PM	PH3 valve closed
6/26/2010	3:04:31 PM	SiCl4 pre valve closed
6/26/2010	3:04:31 PM	SiCl4 post valve closed
6/26/2010	3:04:31 PM	Bubbler valve closed
6/26/2010	3:04:31 PM	Main Vac valve opened
6/26/2010	3:04:31 PM	Bypass valve opened
6/26/2010	3:04:31 PM	Helium MFC set to  0.000000
6/26/2010	3:04:31 PM	H2 MFC set to  0.000000
6/26/2010	3:04:31 PM	BCl3 MFC set to  0.000000
6/26/2010	3:04:31 PM	PHl3 MFC set to  0.000000
6/26/2010	3:04:31 PM	SiCl4 MFC set to  0.000000
6/26/2010	3:04:31 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:04:31 PM	Tube furnace set to 0
6/26/2010	3:09:31 PM	H2 valve closed
6/26/2010	3:09:31 PM	BCl3 valve closed
6/26/2010	3:09:31 PM	PH3 valve closed
6/26/2010	3:09:31 PM	SiCl4 pre valve closed
6/26/2010	3:09:31 PM	SiCl4 post valve closed
6/26/2010	3:09:31 PM	Bubbler valve closed
6/26/2010	3:09:31 PM	Helium valve opened
6/26/2010	3:09:31 PM	Main Vac valve opened
6/26/2010	3:09:31 PM	Bypass valve opened
6/26/2010	3:09:31 PM	Helium MFC set to  100.000000
6/26/2010	3:09:31 PM	H2 MFC set to  0.000000
6/26/2010	3:09:31 PM	BCl3 MFC set to  0.000000
6/26/2010	3:09:31 PM	PHl3 MFC set to  0.000000
6/26/2010	3:09:31 PM	SiCl4 MFC set to  0.000000
6/26/2010	3:09:31 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:09:31 PM	Tube furnace set to 0
6/26/2010	3:11:31 PM	Helium valve closed
6/26/2010	3:11:31 PM	H2 valve closed
6/26/2010	3:11:31 PM	BCl3 valve closed
6/26/2010	3:11:31 PM	PH3 valve closed
6/26/2010	3:11:31 PM	SiCl4 pre valve closed
6/26/2010	3:11:31 PM	SiCl4 post valve closed
6/26/2010	3:11:31 PM	Bubbler valve closed
6/26/2010	3:11:31 PM	Main Vac valve opened
6/26/2010	3:11:31 PM	Bypass valve opened
6/26/2010	3:11:31 PM	Helium MFC set to  0.000000
6/26/2010	3:11:31 PM	H2 MFC set to  0.000000
6/26/2010	3:11:31 PM	BCl3 MFC set to  0.000000
6/26/2010	3:11:31 PM	PHl3 MFC set to  0.000000
6/26/2010	3:11:31 PM	SiCl4 MFC set to  0.000000
6/26/2010	3:11:31 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:11:31 PM	Tube furnace set to 0
6/26/2010	3:14:31 PM	Run finished at 3:14 PM
6/26/2010	3:15:44 PM	Recipe started at 3:15 PM
6/26/2010	3:15:44 PM	H2 valve closed
6/26/2010	3:15:44 PM	BCl3 valve closed
6/26/2010	3:15:44 PM	PH3 valve closed
6/26/2010	3:15:44 PM	SiCl4 pre valve closed
6/26/2010	3:15:44 PM	SiCl4 post valve closed
6/26/2010	3:15:44 PM	Bubbler valve closed
6/26/2010	3:15:44 PM	Helium valve opened
6/26/2010	3:15:44 PM	Main Vac valve opened
6/26/2010	3:15:44 PM	Bypass valve opened
6/26/2010	3:15:44 PM	Helium MFC set to  100.000000
6/26/2010	3:15:44 PM	H2 MFC set to  0.000000
6/26/2010	3:15:44 PM	BCl3 MFC set to  0.000000
6/26/2010	3:15:44 PM	PHl3 MFC set to  0.000000
6/26/2010	3:15:44 PM	SiCl4 MFC set to  0.000000
6/26/2010	3:15:44 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:15:44 PM	Tube furnace set to 0
6/26/2010	3:17:44 PM	Helium valve closed
6/26/2010	3:17:44 PM	H2 valve closed
6/26/2010	3:17:44 PM	BCl3 valve closed
6/26/2010	3:17:44 PM	PH3 valve closed
6/26/2010	3:17:44 PM	SiCl4 pre valve closed
6/26/2010	3:17:44 PM	SiCl4 post valve closed
6/26/2010	3:17:44 PM	Bubbler valve closed
6/26/2010	3:17:44 PM	Main Vac valve opened
6/26/2010	3:17:44 PM	Bypass valve opened
6/26/2010	3:17:44 PM	Helium MFC set to  0.000000
6/26/2010	3:17:44 PM	H2 MFC set to  0.000000
6/26/2010	3:17:44 PM	BCl3 MFC set to  0.000000
6/26/2010	3:17:44 PM	PHl3 MFC set to  0.000000
6/26/2010	3:17:44 PM	SiCl4 MFC set to  0.000000
6/26/2010	3:17:44 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:17:45 PM	Tube furnace set to 0
6/26/2010	3:22:45 PM	H2 valve closed
6/26/2010	3:22:45 PM	BCl3 valve closed
6/26/2010	3:22:45 PM	PH3 valve closed
6/26/2010	3:22:45 PM	SiCl4 pre valve closed
6/26/2010	3:22:45 PM	SiCl4 post valve closed
6/26/2010	3:22:45 PM	Bubbler valve closed
6/26/2010	3:22:45 PM	Helium valve opened
6/26/2010	3:22:45 PM	Main Vac valve opened
6/26/2010	3:22:45 PM	Bypass valve opened
6/26/2010	3:22:45 PM	Helium MFC set to  100.000000
6/26/2010	3:22:45 PM	H2 MFC set to  0.000000
6/26/2010	3:22:45 PM	BCl3 MFC set to  0.000000
6/26/2010	3:22:45 PM	PHl3 MFC set to  0.000000
6/26/2010	3:22:45 PM	SiCl4 MFC set to  0.000000
6/26/2010	3:22:45 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:22:45 PM	Tube furnace set to 0
6/26/2010	3:24:45 PM	Helium valve closed
6/26/2010	3:24:45 PM	H2 valve closed
6/26/2010	3:24:45 PM	BCl3 valve closed
6/26/2010	3:24:45 PM	PH3 valve closed
6/26/2010	3:24:45 PM	SiCl4 pre valve closed
6/26/2010	3:24:45 PM	SiCl4 post valve closed
6/26/2010	3:24:45 PM	Bubbler valve closed
6/26/2010	3:24:45 PM	Main Vac valve opened
6/26/2010	3:24:45 PM	Bypass valve opened
6/26/2010	3:24:45 PM	Helium MFC set to  0.000000
6/26/2010	3:24:45 PM	H2 MFC set to  0.000000
6/26/2010	3:24:45 PM	BCl3 MFC set to  0.000000
6/26/2010	3:24:45 PM	PHl3 MFC set to  0.000000
6/26/2010	3:24:45 PM	SiCl4 MFC set to  0.000000
6/26/2010	3:24:45 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:24:45 PM	Tube furnace set to 0
6/26/2010	3:27:45 PM	Run finished at 3:27 PM
6/26/2010	3:28:20 PM	Recipe started at 3:28 PM
6/26/2010	3:28:20 PM	H2 valve closed
6/26/2010	3:28:20 PM	BCl3 valve closed
6/26/2010	3:28:20 PM	PH3 valve closed
6/26/2010	3:28:20 PM	SiCl4 pre valve closed
6/26/2010	3:28:20 PM	SiCl4 post valve closed
6/26/2010	3:28:20 PM	Bubbler valve closed
6/26/2010	3:28:20 PM	Helium valve opened
6/26/2010	3:28:20 PM	Main Vac valve opened
6/26/2010	3:28:20 PM	Bypass valve opened
6/26/2010	3:28:20 PM	Helium MFC set to  100.000000
6/26/2010	3:28:20 PM	H2 MFC set to  0.000000
6/26/2010	3:28:20 PM	BCl3 MFC set to  0.000000
6/26/2010	3:28:20 PM	PHl3 MFC set to  0.000000
6/26/2010	3:28:20 PM	SiCl4 MFC set to  0.000000
6/26/2010	3:28:20 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:28:20 PM	Tube furnace set to 0
6/26/2010	3:29:39 PM	Helium valve closed
6/26/2010	3:29:39 PM	H2 valve closed
6/26/2010	3:29:39 PM	BCl3 valve closed
6/26/2010	3:29:39 PM	PH3 valve closed
6/26/2010	3:29:39 PM	SiCl4 pre valve closed
6/26/2010	3:29:39 PM	SiCl4 post valve closed
6/26/2010	3:29:39 PM	Bubbler valve closed
6/26/2010	3:29:39 PM	Main Vac valve opened
6/26/2010	3:29:39 PM	Bypass valve opened
6/26/2010	3:29:39 PM	Helium MFC set to  0.000000
6/26/2010	3:29:39 PM	H2 MFC set to  0.000000
6/26/2010	3:29:39 PM	BCl3 MFC set to  0.000000
6/26/2010	3:29:39 PM	PHl3 MFC set to  0.000000
6/26/2010	3:29:39 PM	SiCl4 MFC set to  0.000000
6/26/2010	3:29:39 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:29:39 PM	Tube furnace set to 0
6/26/2010	3:29:44 PM	H2 valve closed
6/26/2010	3:29:44 PM	BCl3 valve closed
6/26/2010	3:29:44 PM	PH3 valve closed
6/26/2010	3:29:44 PM	SiCl4 pre valve closed
6/26/2010	3:29:44 PM	SiCl4 post valve closed
6/26/2010	3:29:44 PM	Bubbler valve closed
6/26/2010	3:29:44 PM	Helium valve opened
6/26/2010	3:29:44 PM	Main Vac valve opened
6/26/2010	3:29:44 PM	Bypass valve opened
6/26/2010	3:29:44 PM	Helium MFC set to  100.000000
6/26/2010	3:29:44 PM	H2 MFC set to  0.000000
6/26/2010	3:29:44 PM	BCl3 MFC set to  0.000000
6/26/2010	3:29:44 PM	PHl3 MFC set to  0.000000
6/26/2010	3:29:44 PM	SiCl4 MFC set to  0.000000
6/26/2010	3:29:44 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:29:44 PM	Tube furnace set to 0
6/26/2010	3:29:48 PM	Helium valve closed
6/26/2010	3:29:48 PM	H2 valve closed
6/26/2010	3:29:48 PM	BCl3 valve closed
6/26/2010	3:29:48 PM	PH3 valve closed
6/26/2010	3:29:48 PM	SiCl4 pre valve closed
6/26/2010	3:29:48 PM	SiCl4 post valve closed
6/26/2010	3:29:48 PM	Bubbler valve closed
6/26/2010	3:29:48 PM	Main Vac valve opened
6/26/2010	3:29:48 PM	Bypass valve opened
6/26/2010	3:29:48 PM	Helium MFC set to  0.000000
6/26/2010	3:29:48 PM	H2 MFC set to  0.000000
6/26/2010	3:29:48 PM	BCl3 MFC set to  0.000000
6/26/2010	3:29:48 PM	PHl3 MFC set to  0.000000
6/26/2010	3:29:48 PM	SiCl4 MFC set to  0.000000
6/26/2010	3:29:48 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:29:48 PM	Tube furnace set to 0
6/26/2010	3:30:36 PM	Run finished at 3:30 PM
6/26/2010	3:30:47 PM	Main Vac valve closed
6/26/2010	3:30:49 PM	Bypass valve closed
6/26/2010	3:31:09 PM	Bypass valve opened
6/26/2010	3:31:10 PM	Main Vac valve opened
6/26/2010	3:44:58 PM	Recipe started at 3:44 PM
6/26/2010	3:44:58 PM	Helium valve closed
6/26/2010	3:44:58 PM	BCl3 valve closed
6/26/2010	3:44:58 PM	PH3 valve closed
6/26/2010	3:44:58 PM	SiCl4 pre valve closed
6/26/2010	3:44:58 PM	SiCl4 post valve closed
6/26/2010	3:44:58 PM	Main Vac valve closed
6/26/2010	3:44:58 PM	Bypass valve closed
6/26/2010	3:44:58 PM	Bubbler valve closed
6/26/2010	3:44:58 PM	H2 valve opened
6/26/2010	3:44:58 PM	Helium MFC set to  0.000000
6/26/2010	3:44:58 PM	H2 MFC set to  500.000000
6/26/2010	3:44:58 PM	BCl3 MFC set to  0.000000
6/26/2010	3:44:58 PM	PHl3 MFC set to  0.000000
6/26/2010	3:44:58 PM	SiCl4 MFC set to  0.000000
6/26/2010	3:44:58 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:44:58 PM	Tube furnace set to 1000
6/26/2010	3:46:19 PM	Helium valve closed
6/26/2010	3:46:19 PM	BCl3 valve closed
6/26/2010	3:46:19 PM	PH3 valve closed
6/26/2010	3:46:19 PM	SiCl4 pre valve closed
6/26/2010	3:46:19 PM	SiCl4 post valve closed
6/26/2010	3:46:19 PM	Main Vac valve closed
6/26/2010	3:46:19 PM	Bypass valve closed
6/26/2010	3:46:19 PM	H2 valve opened
6/26/2010	3:46:19 PM	Bubbler valve opened
6/26/2010	3:46:19 PM	Helium MFC set to  0.000000
6/26/2010	3:46:19 PM	H2 MFC set to  500.000000
6/26/2010	3:46:19 PM	BCl3 MFC set to  0.000000
6/26/2010	3:46:19 PM	PHl3 MFC set to  0.000000
6/26/2010	3:46:19 PM	SiCl4 MFC set to  0.000000
6/26/2010	3:46:19 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	3:46:19 PM	Tube furnace set to 1000
6/26/2010	4:06:19 PM	Helium valve closed
6/26/2010	4:06:19 PM	BCl3 valve closed
6/26/2010	4:06:19 PM	PH3 valve closed
6/26/2010	4:06:19 PM	Main Vac valve closed
6/26/2010	4:06:19 PM	Bypass valve closed
6/26/2010	4:06:19 PM	H2 valve opened
6/26/2010	4:06:19 PM	SiCl4 pre valve opened
6/26/2010	4:06:19 PM	SiCl4 post valve opened
6/26/2010	4:06:19 PM	Bubbler valve opened
6/26/2010	4:06:19 PM	Helium MFC set to  0.000000
6/26/2010	4:06:19 PM	H2 MFC set to  500.000000
6/26/2010	4:06:19 PM	BCl3 MFC set to  0.000000
6/26/2010	4:06:19 PM	PHl3 MFC set to  0.000000
6/26/2010	4:06:19 PM	SiCl4 MFC set to  50.000000
6/26/2010	4:06:19 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	4:06:19 PM	Tube furnace set to 1000
6/26/2010	4:24:19 PM	H2 valve closed
6/26/2010	4:24:19 PM	BCl3 valve closed
6/26/2010	4:24:19 PM	PH3 valve closed
6/26/2010	4:24:19 PM	SiCl4 pre valve closed
6/26/2010	4:24:19 PM	SiCl4 post valve closed
6/26/2010	4:24:19 PM	Main Vac valve closed
6/26/2010	4:24:19 PM	Bypass valve closed
6/26/2010	4:24:19 PM	Helium valve opened
6/26/2010	4:24:19 PM	Bubbler valve opened
6/26/2010	4:24:19 PM	Helium MFC set to  500.000000
6/26/2010	4:24:19 PM	H2 MFC set to  0.000000
6/26/2010	4:24:19 PM	BCl3 MFC set to  0.000000
6/26/2010	4:24:19 PM	PHl3 MFC set to  0.000000
6/26/2010	4:24:19 PM	SiCl4 MFC set to  0.000000
6/26/2010	4:24:19 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	4:24:19 PM	Tube furnace set to 0
6/26/2010	4:44:19 PM	Helium valve closed
6/26/2010	4:44:19 PM	H2 valve closed
6/26/2010	4:44:19 PM	BCl3 valve closed
6/26/2010	4:44:19 PM	PH3 valve closed
6/26/2010	4:44:19 PM	SiCl4 pre valve closed
6/26/2010	4:44:19 PM	SiCl4 post valve closed
6/26/2010	4:44:19 PM	Main Vac valve closed
6/26/2010	4:44:19 PM	Bypass valve closed
6/26/2010	4:44:19 PM	Bubbler valve closed
6/26/2010	4:44:19 PM	Helium MFC set to  0.000000
6/26/2010	4:44:19 PM	H2 MFC set to  0.000000
6/26/2010	4:44:19 PM	BCl3 MFC set to  0.000000
6/26/2010	4:44:19 PM	PHl3 MFC set to  0.000000
6/26/2010	4:44:19 PM	SiCl4 MFC set to  0.000000
6/26/2010	4:44:19 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	4:44:19 PM	Tube furnace set to 0
6/26/2010	4:44:20 PM	Run finished at 4:44 PM
6/26/2010	4:49:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2010	4:49:47 PM	Recipe started at 4:49 PM
6/26/2010	4:49:47 PM	Helium valve closed
6/26/2010	4:49:47 PM	H2 valve closed
6/26/2010	4:49:47 PM	BCl3 valve closed
6/26/2010	4:49:47 PM	PH3 valve closed
6/26/2010	4:49:47 PM	SiCl4 pre valve closed
6/26/2010	4:49:47 PM	SiCl4 post valve closed
6/26/2010	4:49:47 PM	Main Vac valve closed
6/26/2010	4:49:47 PM	Bubbler valve closed
6/26/2010	4:49:47 PM	Bypass valve opened
6/26/2010	4:49:47 PM	Helium MFC set to  0.000000
6/26/2010	4:49:47 PM	H2 MFC set to  0.000000
6/26/2010	4:49:47 PM	BCl3 MFC set to  0.000000
6/26/2010	4:49:47 PM	PHl3 MFC set to  0.000000
6/26/2010	4:49:47 PM	SiCl4 MFC set to  0.000000
6/26/2010	4:49:47 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	4:49:47 PM	Tube furnace set to 0
6/26/2010	4:50:33 PM	Helium valve closed
6/26/2010	4:50:33 PM	H2 valve closed
6/26/2010	4:50:33 PM	BCl3 valve closed
6/26/2010	4:50:33 PM	PH3 valve closed
6/26/2010	4:50:33 PM	SiCl4 pre valve closed
6/26/2010	4:50:33 PM	SiCl4 post valve closed
6/26/2010	4:50:33 PM	Bubbler valve closed
6/26/2010	4:50:33 PM	Main Vac valve opened
6/26/2010	4:50:33 PM	Bypass valve opened
6/26/2010	4:50:33 PM	Helium MFC set to  0.000000
6/26/2010	4:50:33 PM	H2 MFC set to  0.000000
6/26/2010	4:50:33 PM	BCl3 MFC set to  0.000000
6/26/2010	4:50:33 PM	PHl3 MFC set to  0.000000
6/26/2010	4:50:33 PM	SiCl4 MFC set to  0.000000
6/26/2010	4:50:33 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	4:50:33 PM	Tube furnace set to 0
6/26/2010	4:50:34 PM	Run finished at 4:50 PM
6/26/2010	4:50:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2010	4:52:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/26/2010	4:52:42 PM	Recipe started at 4:52 PM
6/26/2010	4:52:42 PM	H2 valve closed
6/26/2010	4:52:42 PM	BCl3 valve closed
6/26/2010	4:52:42 PM	PH3 valve closed
6/26/2010	4:52:42 PM	SiCl4 pre valve closed
6/26/2010	4:52:42 PM	SiCl4 post valve closed
6/26/2010	4:52:42 PM	Main Vac valve closed
6/26/2010	4:52:42 PM	Bypass valve closed
6/26/2010	4:52:42 PM	Bubbler valve closed
6/26/2010	4:52:42 PM	Helium valve opened
6/26/2010	4:52:42 PM	Helium MFC set to  500.000000
6/26/2010	4:52:42 PM	H2 MFC set to  0.000000
6/26/2010	4:52:42 PM	BCl3 MFC set to  0.000000
6/26/2010	4:52:42 PM	PHl3 MFC set to  0.000000
6/26/2010	4:52:42 PM	SiCl4 MFC set to  0.000000
6/26/2010	4:52:42 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	4:52:43 PM	Tube furnace set to 0
6/26/2010	4:53:04 PM	Helium valve closed
6/26/2010	4:53:04 PM	H2 valve closed
6/26/2010	4:53:04 PM	BCl3 valve closed
6/26/2010	4:53:04 PM	PH3 valve closed
6/26/2010	4:53:04 PM	SiCl4 pre valve closed
6/26/2010	4:53:04 PM	SiCl4 post valve closed
6/26/2010	4:53:04 PM	Main Vac valve closed
6/26/2010	4:53:04 PM	Bypass valve closed
6/26/2010	4:53:04 PM	Bubbler valve closed
6/26/2010	4:53:04 PM	Helium MFC set to  0.000000
6/26/2010	4:53:04 PM	H2 MFC set to  0.000000
6/26/2010	4:53:04 PM	BCl3 MFC set to  0.000000
6/26/2010	4:53:04 PM	PHl3 MFC set to  0.000000
6/26/2010	4:53:04 PM	SiCl4 MFC set to  0.000000
6/26/2010	4:53:04 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	4:53:04 PM	Tube furnace set to 0
6/26/2010	4:53:19 PM	Helium valve closed
6/26/2010	4:53:19 PM	H2 valve closed
6/26/2010	4:53:19 PM	BCl3 valve closed
6/26/2010	4:53:19 PM	PH3 valve closed
6/26/2010	4:53:19 PM	SiCl4 pre valve closed
6/26/2010	4:53:19 PM	SiCl4 post valve closed
6/26/2010	4:53:19 PM	Main Vac valve closed
6/26/2010	4:53:19 PM	Bubbler valve closed
6/26/2010	4:53:19 PM	Bypass valve opened
6/26/2010	4:53:19 PM	Helium MFC set to  0.000000
6/26/2010	4:53:19 PM	H2 MFC set to  0.000000
6/26/2010	4:53:19 PM	BCl3 MFC set to  0.000000
6/26/2010	4:53:19 PM	PHl3 MFC set to  0.000000
6/26/2010	4:53:19 PM	SiCl4 MFC set to  0.000000
6/26/2010	4:53:19 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	4:53:19 PM	Tube furnace set to 0
6/26/2010	4:53:40 PM	Helium valve closed
6/26/2010	4:53:40 PM	H2 valve closed
6/26/2010	4:53:40 PM	BCl3 valve closed
6/26/2010	4:53:40 PM	PH3 valve closed
6/26/2010	4:53:40 PM	SiCl4 pre valve closed
6/26/2010	4:53:40 PM	SiCl4 post valve closed
6/26/2010	4:53:40 PM	Bubbler valve closed
6/26/2010	4:53:40 PM	Main Vac valve opened
6/26/2010	4:53:40 PM	Bypass valve opened
6/26/2010	4:53:40 PM	Helium MFC set to  0.000000
6/26/2010	4:53:40 PM	H2 MFC set to  0.000000
6/26/2010	4:53:40 PM	BCl3 MFC set to  0.000000
6/26/2010	4:53:40 PM	PHl3 MFC set to  0.000000
6/26/2010	4:53:40 PM	SiCl4 MFC set to  0.000000
6/26/2010	4:53:40 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	4:53:40 PM	Tube furnace set to 0
6/26/2010	4:58:40 PM	H2 valve closed
6/26/2010	4:58:40 PM	BCl3 valve closed
6/26/2010	4:58:40 PM	PH3 valve closed
6/26/2010	4:58:40 PM	SiCl4 pre valve closed
6/26/2010	4:58:40 PM	SiCl4 post valve closed
6/26/2010	4:58:40 PM	Main Vac valve closed
6/26/2010	4:58:40 PM	Bypass valve closed
6/26/2010	4:58:40 PM	Bubbler valve closed
6/26/2010	4:58:40 PM	Helium valve opened
6/26/2010	4:58:40 PM	Helium MFC set to  500.000000
6/26/2010	4:58:40 PM	H2 MFC set to  0.000000
6/26/2010	4:58:40 PM	BCl3 MFC set to  0.000000
6/26/2010	4:58:40 PM	PHl3 MFC set to  0.000000
6/26/2010	4:58:40 PM	SiCl4 MFC set to  0.000000
6/26/2010	4:58:40 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	4:58:41 PM	Tube furnace set to 0
6/26/2010	4:59:04 PM	Helium valve closed
6/26/2010	4:59:04 PM	H2 valve closed
6/26/2010	4:59:04 PM	BCl3 valve closed
6/26/2010	4:59:04 PM	PH3 valve closed
6/26/2010	4:59:04 PM	SiCl4 pre valve closed
6/26/2010	4:59:04 PM	SiCl4 post valve closed
6/26/2010	4:59:04 PM	Main Vac valve closed
6/26/2010	4:59:04 PM	Bypass valve closed
6/26/2010	4:59:04 PM	Bubbler valve closed
6/26/2010	4:59:04 PM	Helium MFC set to  0.000000
6/26/2010	4:59:04 PM	H2 MFC set to  0.000000
6/26/2010	4:59:04 PM	BCl3 MFC set to  0.000000
6/26/2010	4:59:04 PM	PHl3 MFC set to  0.000000
6/26/2010	4:59:04 PM	SiCl4 MFC set to  0.000000
6/26/2010	4:59:04 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	4:59:04 PM	Tube furnace set to 0
6/26/2010	4:59:19 PM	Helium valve closed
6/26/2010	4:59:19 PM	H2 valve closed
6/26/2010	4:59:19 PM	BCl3 valve closed
6/26/2010	4:59:19 PM	PH3 valve closed
6/26/2010	4:59:19 PM	SiCl4 pre valve closed
6/26/2010	4:59:19 PM	SiCl4 post valve closed
6/26/2010	4:59:19 PM	Main Vac valve closed
6/26/2010	4:59:19 PM	Bubbler valve closed
6/26/2010	4:59:19 PM	Bypass valve opened
6/26/2010	4:59:19 PM	Helium MFC set to  0.000000
6/26/2010	4:59:19 PM	H2 MFC set to  0.000000
6/26/2010	4:59:19 PM	BCl3 MFC set to  0.000000
6/26/2010	4:59:19 PM	PHl3 MFC set to  0.000000
6/26/2010	4:59:19 PM	SiCl4 MFC set to  0.000000
6/26/2010	4:59:19 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	4:59:19 PM	Tube furnace set to 0
6/26/2010	4:59:41 PM	Helium valve closed
6/26/2010	4:59:41 PM	H2 valve closed
6/26/2010	4:59:41 PM	BCl3 valve closed
6/26/2010	4:59:41 PM	PH3 valve closed
6/26/2010	4:59:41 PM	SiCl4 pre valve closed
6/26/2010	4:59:41 PM	SiCl4 post valve closed
6/26/2010	4:59:41 PM	Bubbler valve closed
6/26/2010	4:59:41 PM	Main Vac valve opened
6/26/2010	4:59:41 PM	Bypass valve opened
6/26/2010	4:59:41 PM	Helium MFC set to  0.000000
6/26/2010	4:59:41 PM	H2 MFC set to  0.000000
6/26/2010	4:59:41 PM	BCl3 MFC set to  0.000000
6/26/2010	4:59:41 PM	PHl3 MFC set to  0.000000
6/26/2010	4:59:41 PM	SiCl4 MFC set to  0.000000
6/26/2010	4:59:41 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	4:59:42 PM	Tube furnace set to 0
6/26/2010	5:03:31 PM	H2 valve closed
6/26/2010	5:03:31 PM	BCl3 valve closed
6/26/2010	5:03:31 PM	PH3 valve closed
6/26/2010	5:03:31 PM	SiCl4 pre valve closed
6/26/2010	5:03:31 PM	SiCl4 post valve closed
6/26/2010	5:03:31 PM	Main Vac valve closed
6/26/2010	5:03:31 PM	Bypass valve closed
6/26/2010	5:03:31 PM	Bubbler valve closed
6/26/2010	5:03:31 PM	Helium valve opened
6/26/2010	5:03:31 PM	Helium MFC set to  500.000000
6/26/2010	5:03:31 PM	H2 MFC set to  0.000000
6/26/2010	5:03:31 PM	BCl3 MFC set to  0.000000
6/26/2010	5:03:31 PM	PHl3 MFC set to  0.000000
6/26/2010	5:03:31 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:03:31 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:03:31 PM	Tube furnace set to 0
6/26/2010	5:03:51 PM	Helium valve closed
6/26/2010	5:03:51 PM	H2 valve closed
6/26/2010	5:03:51 PM	BCl3 valve closed
6/26/2010	5:03:51 PM	PH3 valve closed
6/26/2010	5:03:51 PM	SiCl4 pre valve closed
6/26/2010	5:03:51 PM	SiCl4 post valve closed
6/26/2010	5:03:51 PM	Main Vac valve closed
6/26/2010	5:03:51 PM	Bypass valve closed
6/26/2010	5:03:51 PM	Bubbler valve closed
6/26/2010	5:03:51 PM	Helium MFC set to  0.000000
6/26/2010	5:03:51 PM	H2 MFC set to  0.000000
6/26/2010	5:03:51 PM	BCl3 MFC set to  0.000000
6/26/2010	5:03:51 PM	PHl3 MFC set to  0.000000
6/26/2010	5:03:51 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:03:51 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:03:51 PM	Tube furnace set to 0
6/26/2010	5:04:06 PM	Helium valve closed
6/26/2010	5:04:06 PM	H2 valve closed
6/26/2010	5:04:06 PM	BCl3 valve closed
6/26/2010	5:04:06 PM	PH3 valve closed
6/26/2010	5:04:06 PM	SiCl4 pre valve closed
6/26/2010	5:04:06 PM	SiCl4 post valve closed
6/26/2010	5:04:06 PM	Main Vac valve closed
6/26/2010	5:04:06 PM	Bubbler valve closed
6/26/2010	5:04:06 PM	Bypass valve opened
6/26/2010	5:04:06 PM	Helium MFC set to  0.000000
6/26/2010	5:04:06 PM	H2 MFC set to  0.000000
6/26/2010	5:04:06 PM	BCl3 MFC set to  0.000000
6/26/2010	5:04:06 PM	PHl3 MFC set to  0.000000
6/26/2010	5:04:06 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:04:06 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:04:06 PM	Tube furnace set to 0
6/26/2010	5:04:27 PM	Helium valve closed
6/26/2010	5:04:27 PM	H2 valve closed
6/26/2010	5:04:27 PM	BCl3 valve closed
6/26/2010	5:04:27 PM	PH3 valve closed
6/26/2010	5:04:27 PM	SiCl4 pre valve closed
6/26/2010	5:04:27 PM	SiCl4 post valve closed
6/26/2010	5:04:27 PM	Bubbler valve closed
6/26/2010	5:04:27 PM	Main Vac valve opened
6/26/2010	5:04:27 PM	Bypass valve opened
6/26/2010	5:04:27 PM	Helium MFC set to  0.000000
6/26/2010	5:04:27 PM	H2 MFC set to  0.000000
6/26/2010	5:04:27 PM	BCl3 MFC set to  0.000000
6/26/2010	5:04:27 PM	PHl3 MFC set to  0.000000
6/26/2010	5:04:27 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:04:27 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:04:27 PM	Tube furnace set to 0
6/26/2010	5:08:08 PM	Helium valve closed
6/26/2010	5:08:08 PM	H2 valve closed
6/26/2010	5:08:08 PM	BCl3 valve closed
6/26/2010	5:08:08 PM	PH3 valve closed
6/26/2010	5:08:08 PM	SiCl4 pre valve closed
6/26/2010	5:08:08 PM	SiCl4 post valve closed
6/26/2010	5:08:08 PM	Bubbler valve closed
6/26/2010	5:08:08 PM	Main Vac valve opened
6/26/2010	5:08:08 PM	Bypass valve opened
6/26/2010	5:08:08 PM	Helium MFC set to  0.000000
6/26/2010	5:08:08 PM	H2 MFC set to  0.000000
6/26/2010	5:08:08 PM	BCl3 MFC set to  0.000000
6/26/2010	5:08:08 PM	PHl3 MFC set to  0.000000
6/26/2010	5:08:08 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:08:08 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:08:09 PM	Tube furnace set to 0
6/26/2010	5:08:10 PM	Run finished at 5:08 PM
6/26/2010	5:08:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/26/2010	5:08:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/26/2010	5:08:18 PM	Recipe started at 5:08 PM
6/26/2010	5:08:18 PM	H2 valve closed
6/26/2010	5:08:18 PM	BCl3 valve closed
6/26/2010	5:08:18 PM	PH3 valve closed
6/26/2010	5:08:18 PM	SiCl4 pre valve closed
6/26/2010	5:08:18 PM	SiCl4 post valve closed
6/26/2010	5:08:18 PM	Main Vac valve closed
6/26/2010	5:08:18 PM	Bypass valve closed
6/26/2010	5:08:18 PM	Bubbler valve closed
6/26/2010	5:08:18 PM	Helium valve opened
6/26/2010	5:08:18 PM	Helium MFC set to  500.000000
6/26/2010	5:08:18 PM	H2 MFC set to  0.000000
6/26/2010	5:08:18 PM	BCl3 MFC set to  0.000000
6/26/2010	5:08:18 PM	PHl3 MFC set to  0.000000
6/26/2010	5:08:18 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:08:18 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:08:18 PM	Tube furnace set to 0
6/26/2010	5:08:39 PM	Helium valve closed
6/26/2010	5:08:39 PM	H2 valve closed
6/26/2010	5:08:39 PM	BCl3 valve closed
6/26/2010	5:08:39 PM	PH3 valve closed
6/26/2010	5:08:39 PM	SiCl4 pre valve closed
6/26/2010	5:08:39 PM	SiCl4 post valve closed
6/26/2010	5:08:39 PM	Main Vac valve closed
6/26/2010	5:08:39 PM	Bypass valve closed
6/26/2010	5:08:39 PM	Bubbler valve closed
6/26/2010	5:08:39 PM	Helium MFC set to  0.000000
6/26/2010	5:08:39 PM	H2 MFC set to  0.000000
6/26/2010	5:08:39 PM	BCl3 MFC set to  0.000000
6/26/2010	5:08:39 PM	PHl3 MFC set to  0.000000
6/26/2010	5:08:39 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:08:39 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:08:39 PM	Tube furnace set to 0
6/26/2010	5:08:54 PM	Helium valve closed
6/26/2010	5:08:54 PM	H2 valve closed
6/26/2010	5:08:54 PM	BCl3 valve closed
6/26/2010	5:08:54 PM	PH3 valve closed
6/26/2010	5:08:54 PM	SiCl4 pre valve closed
6/26/2010	5:08:54 PM	SiCl4 post valve closed
6/26/2010	5:08:54 PM	Main Vac valve closed
6/26/2010	5:08:54 PM	Bubbler valve closed
6/26/2010	5:08:54 PM	Bypass valve opened
6/26/2010	5:08:54 PM	Helium MFC set to  0.000000
6/26/2010	5:08:54 PM	H2 MFC set to  0.000000
6/26/2010	5:08:54 PM	BCl3 MFC set to  0.000000
6/26/2010	5:08:54 PM	PHl3 MFC set to  0.000000
6/26/2010	5:08:54 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:08:54 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:08:54 PM	Tube furnace set to 0
6/26/2010	5:09:15 PM	Helium valve closed
6/26/2010	5:09:15 PM	H2 valve closed
6/26/2010	5:09:15 PM	BCl3 valve closed
6/26/2010	5:09:15 PM	PH3 valve closed
6/26/2010	5:09:15 PM	SiCl4 pre valve closed
6/26/2010	5:09:15 PM	SiCl4 post valve closed
6/26/2010	5:09:15 PM	Bubbler valve closed
6/26/2010	5:09:15 PM	Main Vac valve opened
6/26/2010	5:09:15 PM	Bypass valve opened
6/26/2010	5:09:15 PM	Helium MFC set to  0.000000
6/26/2010	5:09:15 PM	H2 MFC set to  0.000000
6/26/2010	5:09:15 PM	BCl3 MFC set to  0.000000
6/26/2010	5:09:15 PM	PHl3 MFC set to  0.000000
6/26/2010	5:09:15 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:09:15 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:09:16 PM	Tube furnace set to 0
6/26/2010	5:14:16 PM	H2 valve closed
6/26/2010	5:14:16 PM	BCl3 valve closed
6/26/2010	5:14:16 PM	PH3 valve closed
6/26/2010	5:14:16 PM	SiCl4 pre valve closed
6/26/2010	5:14:16 PM	SiCl4 post valve closed
6/26/2010	5:14:16 PM	Main Vac valve closed
6/26/2010	5:14:16 PM	Bypass valve closed
6/26/2010	5:14:16 PM	Bubbler valve closed
6/26/2010	5:14:16 PM	Helium valve opened
6/26/2010	5:14:16 PM	Helium MFC set to  500.000000
6/26/2010	5:14:16 PM	H2 MFC set to  0.000000
6/26/2010	5:14:16 PM	BCl3 MFC set to  0.000000
6/26/2010	5:14:16 PM	PHl3 MFC set to  0.000000
6/26/2010	5:14:16 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:14:16 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:14:16 PM	Tube furnace set to 0
6/26/2010	5:14:44 PM	Helium valve closed
6/26/2010	5:14:44 PM	H2 valve closed
6/26/2010	5:14:44 PM	BCl3 valve closed
6/26/2010	5:14:44 PM	PH3 valve closed
6/26/2010	5:14:44 PM	SiCl4 pre valve closed
6/26/2010	5:14:44 PM	SiCl4 post valve closed
6/26/2010	5:14:44 PM	Main Vac valve closed
6/26/2010	5:14:44 PM	Bypass valve closed
6/26/2010	5:14:44 PM	Bubbler valve closed
6/26/2010	5:14:44 PM	Helium MFC set to  0.000000
6/26/2010	5:14:44 PM	H2 MFC set to  0.000000
6/26/2010	5:14:44 PM	BCl3 MFC set to  0.000000
6/26/2010	5:14:44 PM	PHl3 MFC set to  0.000000
6/26/2010	5:14:44 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:14:44 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:14:44 PM	Tube furnace set to 0
6/26/2010	5:14:59 PM	Helium valve closed
6/26/2010	5:14:59 PM	H2 valve closed
6/26/2010	5:14:59 PM	BCl3 valve closed
6/26/2010	5:14:59 PM	PH3 valve closed
6/26/2010	5:14:59 PM	SiCl4 pre valve closed
6/26/2010	5:14:59 PM	SiCl4 post valve closed
6/26/2010	5:14:59 PM	Main Vac valve closed
6/26/2010	5:14:59 PM	Bubbler valve closed
6/26/2010	5:14:59 PM	Bypass valve opened
6/26/2010	5:14:59 PM	Helium MFC set to  0.000000
6/26/2010	5:14:59 PM	H2 MFC set to  0.000000
6/26/2010	5:14:59 PM	BCl3 MFC set to  0.000000
6/26/2010	5:14:59 PM	PHl3 MFC set to  0.000000
6/26/2010	5:14:59 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:14:59 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:14:59 PM	Tube furnace set to 0
6/26/2010	5:15:24 PM	Helium valve closed
6/26/2010	5:15:24 PM	H2 valve closed
6/26/2010	5:15:24 PM	BCl3 valve closed
6/26/2010	5:15:24 PM	PH3 valve closed
6/26/2010	5:15:24 PM	SiCl4 pre valve closed
6/26/2010	5:15:24 PM	SiCl4 post valve closed
6/26/2010	5:15:24 PM	Bubbler valve closed
6/26/2010	5:15:24 PM	Main Vac valve opened
6/26/2010	5:15:24 PM	Bypass valve opened
6/26/2010	5:15:24 PM	Helium MFC set to  0.000000
6/26/2010	5:15:24 PM	H2 MFC set to  0.000000
6/26/2010	5:15:24 PM	BCl3 MFC set to  0.000000
6/26/2010	5:15:24 PM	PHl3 MFC set to  0.000000
6/26/2010	5:15:24 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:15:24 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:15:24 PM	Tube furnace set to 0
6/26/2010	5:18:03 PM	H2 valve closed
6/26/2010	5:18:03 PM	BCl3 valve closed
6/26/2010	5:18:03 PM	PH3 valve closed
6/26/2010	5:18:03 PM	SiCl4 pre valve closed
6/26/2010	5:18:03 PM	SiCl4 post valve closed
6/26/2010	5:18:03 PM	Main Vac valve closed
6/26/2010	5:18:03 PM	Bypass valve closed
6/26/2010	5:18:03 PM	Bubbler valve closed
6/26/2010	5:18:03 PM	Helium valve opened
6/26/2010	5:18:03 PM	Helium MFC set to  500.000000
6/26/2010	5:18:03 PM	H2 MFC set to  0.000000
6/26/2010	5:18:03 PM	BCl3 MFC set to  0.000000
6/26/2010	5:18:03 PM	PHl3 MFC set to  0.000000
6/26/2010	5:18:03 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:18:03 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:18:03 PM	Tube furnace set to 0
6/26/2010	5:19:05 PM	Helium valve closed
6/26/2010	5:19:05 PM	H2 valve closed
6/26/2010	5:19:05 PM	BCl3 valve closed
6/26/2010	5:19:05 PM	PH3 valve closed
6/26/2010	5:19:05 PM	SiCl4 pre valve closed
6/26/2010	5:19:05 PM	SiCl4 post valve closed
6/26/2010	5:19:05 PM	Main Vac valve closed
6/26/2010	5:19:05 PM	Bypass valve closed
6/26/2010	5:19:05 PM	Bubbler valve closed
6/26/2010	5:19:05 PM	Helium MFC set to  0.000000
6/26/2010	5:19:05 PM	H2 MFC set to  0.000000
6/26/2010	5:19:05 PM	BCl3 MFC set to  0.000000
6/26/2010	5:19:05 PM	PHl3 MFC set to  0.000000
6/26/2010	5:19:05 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:19:05 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:19:05 PM	Tube furnace set to 0
6/26/2010	5:19:20 PM	Helium valve closed
6/26/2010	5:19:20 PM	H2 valve closed
6/26/2010	5:19:20 PM	BCl3 valve closed
6/26/2010	5:19:20 PM	PH3 valve closed
6/26/2010	5:19:20 PM	SiCl4 pre valve closed
6/26/2010	5:19:20 PM	SiCl4 post valve closed
6/26/2010	5:19:20 PM	Main Vac valve closed
6/26/2010	5:19:20 PM	Bubbler valve closed
6/26/2010	5:19:20 PM	Bypass valve opened
6/26/2010	5:19:20 PM	Helium MFC set to  0.000000
6/26/2010	5:19:20 PM	H2 MFC set to  0.000000
6/26/2010	5:19:20 PM	BCl3 MFC set to  0.000000
6/26/2010	5:19:20 PM	PHl3 MFC set to  0.000000
6/26/2010	5:19:20 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:19:20 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:19:21 PM	Tube furnace set to 0
6/26/2010	5:19:52 PM	Helium valve closed
6/26/2010	5:19:52 PM	H2 valve closed
6/26/2010	5:19:52 PM	BCl3 valve closed
6/26/2010	5:19:52 PM	PH3 valve closed
6/26/2010	5:19:52 PM	SiCl4 pre valve closed
6/26/2010	5:19:52 PM	SiCl4 post valve closed
6/26/2010	5:19:52 PM	Bubbler valve closed
6/26/2010	5:19:52 PM	Main Vac valve opened
6/26/2010	5:19:52 PM	Bypass valve opened
6/26/2010	5:19:52 PM	Helium MFC set to  0.000000
6/26/2010	5:19:52 PM	H2 MFC set to  0.000000
6/26/2010	5:19:52 PM	BCl3 MFC set to  0.000000
6/26/2010	5:19:52 PM	PHl3 MFC set to  0.000000
6/26/2010	5:19:52 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:19:52 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:19:52 PM	Tube furnace set to 0
6/26/2010	5:20:41 PM	Helium valve closed
6/26/2010	5:20:41 PM	H2 valve closed
6/26/2010	5:20:41 PM	BCl3 valve closed
6/26/2010	5:20:41 PM	PH3 valve closed
6/26/2010	5:20:41 PM	SiCl4 pre valve closed
6/26/2010	5:20:41 PM	SiCl4 post valve closed
6/26/2010	5:20:41 PM	Bubbler valve closed
6/26/2010	5:20:41 PM	Main Vac valve opened
6/26/2010	5:20:41 PM	Bypass valve opened
6/26/2010	5:20:41 PM	Helium MFC set to  0.000000
6/26/2010	5:20:41 PM	H2 MFC set to  0.000000
6/26/2010	5:20:41 PM	BCl3 MFC set to  0.000000
6/26/2010	5:20:41 PM	PHl3 MFC set to  0.000000
6/26/2010	5:20:41 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:20:41 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:20:41 PM	Tube furnace set to 0
6/26/2010	5:20:42 PM	Run finished at 5:20 PM
6/26/2010	5:20:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/26/2010	5:21:26 PM	Recipe started at 5:21 PM
6/26/2010	5:21:26 PM	H2 valve closed
6/26/2010	5:21:26 PM	BCl3 valve closed
6/26/2010	5:21:26 PM	PH3 valve closed
6/26/2010	5:21:26 PM	SiCl4 pre valve closed
6/26/2010	5:21:26 PM	SiCl4 post valve closed
6/26/2010	5:21:26 PM	Bubbler valve closed
6/26/2010	5:21:26 PM	Helium valve opened
6/26/2010	5:21:26 PM	Main Vac valve opened
6/26/2010	5:21:26 PM	Bypass valve opened
6/26/2010	5:21:26 PM	Helium MFC set to  100.000000
6/26/2010	5:21:26 PM	H2 MFC set to  0.000000
6/26/2010	5:21:26 PM	BCl3 MFC set to  0.000000
6/26/2010	5:21:26 PM	PHl3 MFC set to  0.000000
6/26/2010	5:21:26 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:21:26 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:21:26 PM	Tube furnace set to 0
6/26/2010	5:23:26 PM	Helium valve closed
6/26/2010	5:23:26 PM	H2 valve closed
6/26/2010	5:23:26 PM	BCl3 valve closed
6/26/2010	5:23:26 PM	PH3 valve closed
6/26/2010	5:23:26 PM	SiCl4 pre valve closed
6/26/2010	5:23:26 PM	SiCl4 post valve closed
6/26/2010	5:23:26 PM	Bubbler valve closed
6/26/2010	5:23:26 PM	Main Vac valve opened
6/26/2010	5:23:26 PM	Bypass valve opened
6/26/2010	5:23:26 PM	Helium MFC set to  0.000000
6/26/2010	5:23:26 PM	H2 MFC set to  0.000000
6/26/2010	5:23:26 PM	BCl3 MFC set to  0.000000
6/26/2010	5:23:26 PM	PHl3 MFC set to  0.000000
6/26/2010	5:23:26 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:23:26 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:23:26 PM	Tube furnace set to 0
6/26/2010	5:24:26 PM	H2 valve closed
6/26/2010	5:24:26 PM	BCl3 valve closed
6/26/2010	5:24:26 PM	PH3 valve closed
6/26/2010	5:24:26 PM	SiCl4 pre valve closed
6/26/2010	5:24:26 PM	SiCl4 post valve closed
6/26/2010	5:24:26 PM	Bubbler valve closed
6/26/2010	5:24:26 PM	Helium valve opened
6/26/2010	5:24:26 PM	Main Vac valve opened
6/26/2010	5:24:26 PM	Bypass valve opened
6/26/2010	5:24:26 PM	Helium MFC set to  100.000000
6/26/2010	5:24:26 PM	H2 MFC set to  0.000000
6/26/2010	5:24:26 PM	BCl3 MFC set to  0.000000
6/26/2010	5:24:26 PM	PHl3 MFC set to  0.000000
6/26/2010	5:24:26 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:24:26 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:24:26 PM	Tube furnace set to 0
6/26/2010	5:24:57 PM	Helium valve closed
6/26/2010	5:24:57 PM	H2 valve closed
6/26/2010	5:24:57 PM	BCl3 valve closed
6/26/2010	5:24:57 PM	PH3 valve closed
6/26/2010	5:24:57 PM	SiCl4 pre valve closed
6/26/2010	5:24:57 PM	SiCl4 post valve closed
6/26/2010	5:24:57 PM	Bubbler valve closed
6/26/2010	5:24:57 PM	Main Vac valve opened
6/26/2010	5:24:57 PM	Bypass valve opened
6/26/2010	5:24:57 PM	Helium MFC set to  0.000000
6/26/2010	5:24:57 PM	H2 MFC set to  0.000000
6/26/2010	5:24:57 PM	BCl3 MFC set to  0.000000
6/26/2010	5:24:57 PM	PHl3 MFC set to  0.000000
6/26/2010	5:24:57 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:24:57 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:24:57 PM	Tube furnace set to 0
6/26/2010	5:26:07 PM	Run finished at 5:26 PM
6/26/2010	5:26:13 PM	Main Vac valve closed
6/26/2010	5:26:15 PM	Bypass valve closed
6/26/2010	5:26:36 PM	Bypass valve opened
6/26/2010	5:26:38 PM	Main Vac valve opened
6/26/2010	5:26:53 PM	Helium MFC set to  100.000000
6/26/2010	5:26:54 PM	Helium valve opened
6/26/2010	5:27:05 PM	Helium MFC set to  0.000000
6/26/2010	5:27:06 PM	Helium valve closed
6/26/2010	5:35:54 PM	Recipe started at 5:35 PM
6/26/2010	5:35:54 PM	Helium valve closed
6/26/2010	5:35:54 PM	BCl3 valve closed
6/26/2010	5:35:54 PM	PH3 valve closed
6/26/2010	5:35:54 PM	SiCl4 pre valve closed
6/26/2010	5:35:54 PM	SiCl4 post valve closed
6/26/2010	5:35:54 PM	Main Vac valve closed
6/26/2010	5:35:54 PM	Bypass valve closed
6/26/2010	5:35:54 PM	Bubbler valve closed
6/26/2010	5:35:54 PM	H2 valve opened
6/26/2010	5:35:54 PM	Helium MFC set to  0.000000
6/26/2010	5:35:54 PM	H2 MFC set to  500.000000
6/26/2010	5:35:54 PM	BCl3 MFC set to  0.000000
6/26/2010	5:35:54 PM	PHl3 MFC set to  0.000000
6/26/2010	5:35:54 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:35:54 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:35:54 PM	Tube furnace set to 1000
6/26/2010	5:37:14 PM	Helium valve closed
6/26/2010	5:37:14 PM	BCl3 valve closed
6/26/2010	5:37:14 PM	PH3 valve closed
6/26/2010	5:37:14 PM	SiCl4 pre valve closed
6/26/2010	5:37:14 PM	SiCl4 post valve closed
6/26/2010	5:37:14 PM	Main Vac valve closed
6/26/2010	5:37:14 PM	Bypass valve closed
6/26/2010	5:37:14 PM	H2 valve opened
6/26/2010	5:37:14 PM	Bubbler valve opened
6/26/2010	5:37:14 PM	Helium MFC set to  0.000000
6/26/2010	5:37:14 PM	H2 MFC set to  500.000000
6/26/2010	5:37:14 PM	BCl3 MFC set to  0.000000
6/26/2010	5:37:14 PM	PHl3 MFC set to  0.000000
6/26/2010	5:37:14 PM	SiCl4 MFC set to  0.000000
6/26/2010	5:37:14 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:37:14 PM	Tube furnace set to 1000
6/26/2010	5:57:14 PM	Helium valve closed
6/26/2010	5:57:14 PM	BCl3 valve closed
6/26/2010	5:57:14 PM	PH3 valve closed
6/26/2010	5:57:14 PM	Main Vac valve closed
6/26/2010	5:57:14 PM	Bypass valve closed
6/26/2010	5:57:14 PM	H2 valve opened
6/26/2010	5:57:14 PM	SiCl4 pre valve opened
6/26/2010	5:57:14 PM	SiCl4 post valve opened
6/26/2010	5:57:14 PM	Bubbler valve opened
6/26/2010	5:57:14 PM	Helium MFC set to  0.000000
6/26/2010	5:57:14 PM	H2 MFC set to  500.000000
6/26/2010	5:57:14 PM	BCl3 MFC set to  0.000000
6/26/2010	5:57:14 PM	PHl3 MFC set to  0.000000
6/26/2010	5:57:14 PM	SiCl4 MFC set to  50.000000
6/26/2010	5:57:14 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	5:57:14 PM	Tube furnace set to 1000
6/26/2010	6:15:14 PM	H2 valve closed
6/26/2010	6:15:14 PM	BCl3 valve closed
6/26/2010	6:15:14 PM	PH3 valve closed
6/26/2010	6:15:14 PM	SiCl4 pre valve closed
6/26/2010	6:15:14 PM	SiCl4 post valve closed
6/26/2010	6:15:14 PM	Main Vac valve closed
6/26/2010	6:15:14 PM	Bypass valve closed
6/26/2010	6:15:14 PM	Helium valve opened
6/26/2010	6:15:14 PM	Bubbler valve opened
6/26/2010	6:15:14 PM	Helium MFC set to  500.000000
6/26/2010	6:15:14 PM	H2 MFC set to  0.000000
6/26/2010	6:15:14 PM	BCl3 MFC set to  0.000000
6/26/2010	6:15:14 PM	PHl3 MFC set to  0.000000
6/26/2010	6:15:14 PM	SiCl4 MFC set to  0.000000
6/26/2010	6:15:14 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	6:15:15 PM	Tube furnace set to 0
6/26/2010	6:35:15 PM	Helium valve closed
6/26/2010	6:35:15 PM	H2 valve closed
6/26/2010	6:35:15 PM	BCl3 valve closed
6/26/2010	6:35:15 PM	PH3 valve closed
6/26/2010	6:35:15 PM	SiCl4 pre valve closed
6/26/2010	6:35:15 PM	SiCl4 post valve closed
6/26/2010	6:35:15 PM	Main Vac valve closed
6/26/2010	6:35:15 PM	Bypass valve closed
6/26/2010	6:35:15 PM	Bubbler valve closed
6/26/2010	6:35:15 PM	Helium MFC set to  0.000000
6/26/2010	6:35:15 PM	H2 MFC set to  0.000000
6/26/2010	6:35:15 PM	BCl3 MFC set to  0.000000
6/26/2010	6:35:15 PM	PHl3 MFC set to  0.000000
6/26/2010	6:35:15 PM	SiCl4 MFC set to  0.000000
6/26/2010	6:35:15 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	6:35:15 PM	Tube furnace set to 0
6/26/2010	6:35:15 PM	Run finished at 6:35 PM
6/26/2010	6:48:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2010	6:48:40 PM	Recipe started at 6:48 PM
6/26/2010	6:48:40 PM	Helium valve closed
6/26/2010	6:48:40 PM	H2 valve closed
6/26/2010	6:48:40 PM	BCl3 valve closed
6/26/2010	6:48:40 PM	PH3 valve closed
6/26/2010	6:48:40 PM	SiCl4 pre valve closed
6/26/2010	6:48:40 PM	SiCl4 post valve closed
6/26/2010	6:48:40 PM	Main Vac valve closed
6/26/2010	6:48:40 PM	Bubbler valve closed
6/26/2010	6:48:40 PM	Bypass valve opened
6/26/2010	6:48:40 PM	Helium MFC set to  0.000000
6/26/2010	6:48:40 PM	H2 MFC set to  0.000000
6/26/2010	6:48:40 PM	BCl3 MFC set to  0.000000
6/26/2010	6:48:40 PM	PHl3 MFC set to  0.000000
6/26/2010	6:48:40 PM	SiCl4 MFC set to  0.000000
6/26/2010	6:48:40 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	6:48:41 PM	Tube furnace set to 0
6/26/2010	6:49:29 PM	Helium valve closed
6/26/2010	6:49:29 PM	H2 valve closed
6/26/2010	6:49:29 PM	BCl3 valve closed
6/26/2010	6:49:29 PM	PH3 valve closed
6/26/2010	6:49:29 PM	SiCl4 pre valve closed
6/26/2010	6:49:29 PM	SiCl4 post valve closed
6/26/2010	6:49:29 PM	Bubbler valve closed
6/26/2010	6:49:29 PM	Main Vac valve opened
6/26/2010	6:49:29 PM	Bypass valve opened
6/26/2010	6:49:29 PM	Helium MFC set to  0.000000
6/26/2010	6:49:29 PM	H2 MFC set to  0.000000
6/26/2010	6:49:29 PM	BCl3 MFC set to  0.000000
6/26/2010	6:49:29 PM	PHl3 MFC set to  0.000000
6/26/2010	6:49:29 PM	SiCl4 MFC set to  0.000000
6/26/2010	6:49:29 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	6:49:29 PM	Tube furnace set to 0
6/26/2010	6:49:29 PM	Run finished at 6:49 PM
6/26/2010	6:49:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2010	6:50:21 PM	Recipe started at 6:50 PM
6/26/2010	6:50:21 PM	H2 valve closed
6/26/2010	6:50:21 PM	BCl3 valve closed
6/26/2010	6:50:21 PM	PH3 valve closed
6/26/2010	6:50:21 PM	SiCl4 pre valve closed
6/26/2010	6:50:21 PM	SiCl4 post valve closed
6/26/2010	6:50:21 PM	Bubbler valve closed
6/26/2010	6:50:21 PM	Helium valve opened
6/26/2010	6:50:21 PM	Main Vac valve opened
6/26/2010	6:50:21 PM	Bypass valve opened
6/26/2010	6:50:21 PM	Helium MFC set to  100.000000
6/26/2010	6:50:21 PM	H2 MFC set to  0.000000
6/26/2010	6:50:21 PM	BCl3 MFC set to  0.000000
6/26/2010	6:50:21 PM	PHl3 MFC set to  0.000000
6/26/2010	6:50:21 PM	SiCl4 MFC set to  0.000000
6/26/2010	6:50:21 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	6:50:21 PM	Tube furnace set to 0
6/26/2010	6:52:21 PM	Helium valve closed
6/26/2010	6:52:21 PM	H2 valve closed
6/26/2010	6:52:21 PM	BCl3 valve closed
6/26/2010	6:52:21 PM	PH3 valve closed
6/26/2010	6:52:21 PM	SiCl4 pre valve closed
6/26/2010	6:52:21 PM	SiCl4 post valve closed
6/26/2010	6:52:21 PM	Bubbler valve closed
6/26/2010	6:52:21 PM	Main Vac valve opened
6/26/2010	6:52:21 PM	Bypass valve opened
6/26/2010	6:52:21 PM	Helium MFC set to  0.000000
6/26/2010	6:52:21 PM	H2 MFC set to  0.000000
6/26/2010	6:52:21 PM	BCl3 MFC set to  0.000000
6/26/2010	6:52:21 PM	PHl3 MFC set to  0.000000
6/26/2010	6:52:21 PM	SiCl4 MFC set to  0.000000
6/26/2010	6:52:21 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	6:52:21 PM	Tube furnace set to 0
6/26/2010	6:57:21 PM	H2 valve closed
6/26/2010	6:57:21 PM	BCl3 valve closed
6/26/2010	6:57:21 PM	PH3 valve closed
6/26/2010	6:57:21 PM	SiCl4 pre valve closed
6/26/2010	6:57:21 PM	SiCl4 post valve closed
6/26/2010	6:57:21 PM	Bubbler valve closed
6/26/2010	6:57:21 PM	Helium valve opened
6/26/2010	6:57:21 PM	Main Vac valve opened
6/26/2010	6:57:21 PM	Bypass valve opened
6/26/2010	6:57:21 PM	Helium MFC set to  100.000000
6/26/2010	6:57:21 PM	H2 MFC set to  0.000000
6/26/2010	6:57:21 PM	BCl3 MFC set to  0.000000
6/26/2010	6:57:21 PM	PHl3 MFC set to  0.000000
6/26/2010	6:57:21 PM	SiCl4 MFC set to  0.000000
6/26/2010	6:57:21 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	6:57:22 PM	Tube furnace set to 0
6/26/2010	6:59:22 PM	Helium valve closed
6/26/2010	6:59:22 PM	H2 valve closed
6/26/2010	6:59:22 PM	BCl3 valve closed
6/26/2010	6:59:22 PM	PH3 valve closed
6/26/2010	6:59:22 PM	SiCl4 pre valve closed
6/26/2010	6:59:22 PM	SiCl4 post valve closed
6/26/2010	6:59:22 PM	Bubbler valve closed
6/26/2010	6:59:22 PM	Main Vac valve opened
6/26/2010	6:59:22 PM	Bypass valve opened
6/26/2010	6:59:22 PM	Helium MFC set to  0.000000
6/26/2010	6:59:22 PM	H2 MFC set to  0.000000
6/26/2010	6:59:22 PM	BCl3 MFC set to  0.000000
6/26/2010	6:59:22 PM	PHl3 MFC set to  0.000000
6/26/2010	6:59:22 PM	SiCl4 MFC set to  0.000000
6/26/2010	6:59:22 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	6:59:22 PM	Tube furnace set to 0
6/26/2010	7:02:22 PM	Run finished at 7:02 PM
6/26/2010	8:03:16 PM	Recipe started at 8:03 PM
6/26/2010	8:03:16 PM	H2 valve closed
6/26/2010	8:03:16 PM	BCl3 valve closed
6/26/2010	8:03:16 PM	PH3 valve closed
6/26/2010	8:03:16 PM	SiCl4 pre valve closed
6/26/2010	8:03:16 PM	SiCl4 post valve closed
6/26/2010	8:03:16 PM	Bubbler valve closed
6/26/2010	8:03:16 PM	Helium valve opened
6/26/2010	8:03:16 PM	Main Vac valve opened
6/26/2010	8:03:16 PM	Bypass valve opened
6/26/2010	8:03:16 PM	Helium MFC set to  100.000000
6/26/2010	8:03:16 PM	H2 MFC set to  0.000000
6/26/2010	8:03:16 PM	BCl3 MFC set to  0.000000
6/26/2010	8:03:16 PM	PHl3 MFC set to  0.000000
6/26/2010	8:03:16 PM	SiCl4 MFC set to  0.000000
6/26/2010	8:03:16 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	8:03:17 PM	Tube furnace set to 0
6/26/2010	8:03:28 PM	Helium valve closed
6/26/2010	8:03:28 PM	H2 valve closed
6/26/2010	8:03:28 PM	BCl3 valve closed
6/26/2010	8:03:28 PM	PH3 valve closed
6/26/2010	8:03:28 PM	SiCl4 pre valve closed
6/26/2010	8:03:28 PM	SiCl4 post valve closed
6/26/2010	8:03:28 PM	Bubbler valve closed
6/26/2010	8:03:28 PM	Main Vac valve opened
6/26/2010	8:03:28 PM	Bypass valve opened
6/26/2010	8:03:28 PM	Helium MFC set to  0.000000
6/26/2010	8:03:28 PM	H2 MFC set to  0.000000
6/26/2010	8:03:28 PM	BCl3 MFC set to  0.000000
6/26/2010	8:03:28 PM	PHl3 MFC set to  0.000000
6/26/2010	8:03:28 PM	SiCl4 MFC set to  0.000000
6/26/2010	8:03:28 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	8:03:29 PM	Tube furnace set to 0
6/26/2010	8:04:04 PM	H2 valve closed
6/26/2010	8:04:04 PM	BCl3 valve closed
6/26/2010	8:04:04 PM	PH3 valve closed
6/26/2010	8:04:04 PM	SiCl4 pre valve closed
6/26/2010	8:04:04 PM	SiCl4 post valve closed
6/26/2010	8:04:04 PM	Bubbler valve closed
6/26/2010	8:04:04 PM	Helium valve opened
6/26/2010	8:04:04 PM	Main Vac valve opened
6/26/2010	8:04:04 PM	Bypass valve opened
6/26/2010	8:04:04 PM	Helium MFC set to  100.000000
6/26/2010	8:04:04 PM	H2 MFC set to  0.000000
6/26/2010	8:04:04 PM	BCl3 MFC set to  0.000000
6/26/2010	8:04:04 PM	PHl3 MFC set to  0.000000
6/26/2010	8:04:04 PM	SiCl4 MFC set to  0.000000
6/26/2010	8:04:04 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	8:04:04 PM	Tube furnace set to 0
6/26/2010	8:05:41 PM	Helium valve closed
6/26/2010	8:05:41 PM	H2 valve closed
6/26/2010	8:05:42 PM	BCl3 valve closed
6/26/2010	8:05:42 PM	PH3 valve closed
6/26/2010	8:05:42 PM	SiCl4 pre valve closed
6/26/2010	8:05:42 PM	SiCl4 post valve closed
6/26/2010	8:05:42 PM	Bubbler valve closed
6/26/2010	8:05:42 PM	Main Vac valve opened
6/26/2010	8:05:42 PM	Bypass valve opened
6/26/2010	8:05:42 PM	Helium MFC set to  0.000000
6/26/2010	8:05:42 PM	H2 MFC set to  0.000000
6/26/2010	8:05:42 PM	BCl3 MFC set to  0.000000
6/26/2010	8:05:42 PM	PHl3 MFC set to  0.000000
6/26/2010	8:05:42 PM	SiCl4 MFC set to  0.000000
6/26/2010	8:05:42 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	8:05:42 PM	Tube furnace set to 0
6/26/2010	8:06:49 PM	Run finished at 8:06 PM
6/26/2010	8:06:59 PM	Main Vac valve closed
6/26/2010	8:07:08 PM	Bypass valve closed
6/26/2010	8:07:24 PM	Bypass valve opened
6/26/2010	8:07:27 PM	Main Vac valve opened
6/26/2010	8:10:41 PM	Recipe started at 8:10 PM
6/26/2010	8:10:41 PM	Helium valve closed
6/26/2010	8:10:41 PM	BCl3 valve closed
6/26/2010	8:10:41 PM	PH3 valve closed
6/26/2010	8:10:41 PM	SiCl4 pre valve closed
6/26/2010	8:10:41 PM	SiCl4 post valve closed
6/26/2010	8:10:41 PM	Main Vac valve closed
6/26/2010	8:10:41 PM	Bypass valve closed
6/26/2010	8:10:41 PM	Bubbler valve closed
6/26/2010	8:10:41 PM	H2 valve opened
6/26/2010	8:10:41 PM	Helium MFC set to  0.000000
6/26/2010	8:10:41 PM	H2 MFC set to  500.000000
6/26/2010	8:10:41 PM	BCl3 MFC set to  0.000000
6/26/2010	8:10:41 PM	PHl3 MFC set to  0.000000
6/26/2010	8:10:41 PM	SiCl4 MFC set to  0.000000
6/26/2010	8:10:41 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	8:10:41 PM	Tube furnace set to 1000
6/26/2010	8:11:58 PM	Helium valve closed
6/26/2010	8:11:58 PM	BCl3 valve closed
6/26/2010	8:11:58 PM	PH3 valve closed
6/26/2010	8:11:58 PM	SiCl4 pre valve closed
6/26/2010	8:11:58 PM	SiCl4 post valve closed
6/26/2010	8:11:58 PM	Main Vac valve closed
6/26/2010	8:11:58 PM	Bypass valve closed
6/26/2010	8:11:58 PM	H2 valve opened
6/26/2010	8:11:58 PM	Bubbler valve opened
6/26/2010	8:11:58 PM	Helium MFC set to  0.000000
6/26/2010	8:11:58 PM	H2 MFC set to  500.000000
6/26/2010	8:11:58 PM	BCl3 MFC set to  0.000000
6/26/2010	8:11:59 PM	PHl3 MFC set to  0.000000
6/26/2010	8:11:59 PM	SiCl4 MFC set to  0.000000
6/26/2010	8:11:59 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	8:11:59 PM	Tube furnace set to 1000
6/26/2010	8:31:59 PM	Helium valve closed
6/26/2010	8:31:59 PM	BCl3 valve closed
6/26/2010	8:31:59 PM	PH3 valve closed
6/26/2010	8:31:59 PM	Main Vac valve closed
6/26/2010	8:31:59 PM	Bypass valve closed
6/26/2010	8:31:59 PM	H2 valve opened
6/26/2010	8:31:59 PM	SiCl4 pre valve opened
6/26/2010	8:31:59 PM	SiCl4 post valve opened
6/26/2010	8:31:59 PM	Bubbler valve opened
6/26/2010	8:31:59 PM	Helium MFC set to  0.000000
6/26/2010	8:31:59 PM	H2 MFC set to  500.000000
6/26/2010	8:31:59 PM	BCl3 MFC set to  0.000000
6/26/2010	8:31:59 PM	PHl3 MFC set to  0.000000
6/26/2010	8:31:59 PM	SiCl4 MFC set to  50.000000
6/26/2010	8:31:59 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	8:31:59 PM	Tube furnace set to 1000
6/26/2010	8:49:59 PM	H2 valve closed
6/26/2010	8:49:59 PM	BCl3 valve closed
6/26/2010	8:49:59 PM	PH3 valve closed
6/26/2010	8:49:59 PM	SiCl4 pre valve closed
6/26/2010	8:49:59 PM	SiCl4 post valve closed
6/26/2010	8:49:59 PM	Main Vac valve closed
6/26/2010	8:49:59 PM	Bypass valve closed
6/26/2010	8:49:59 PM	Helium valve opened
6/26/2010	8:49:59 PM	Bubbler valve opened
6/26/2010	8:49:59 PM	Helium MFC set to  500.000000
6/26/2010	8:49:59 PM	H2 MFC set to  0.000000
6/26/2010	8:49:59 PM	BCl3 MFC set to  0.000000
6/26/2010	8:49:59 PM	PHl3 MFC set to  0.000000
6/26/2010	8:49:59 PM	SiCl4 MFC set to  0.000000
6/26/2010	8:49:59 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	8:49:59 PM	Tube furnace set to 0
6/26/2010	9:09:59 PM	Helium valve closed
6/26/2010	9:09:59 PM	H2 valve closed
6/26/2010	9:09:59 PM	BCl3 valve closed
6/26/2010	9:09:59 PM	PH3 valve closed
6/26/2010	9:09:59 PM	SiCl4 pre valve closed
6/26/2010	9:09:59 PM	SiCl4 post valve closed
6/26/2010	9:09:59 PM	Main Vac valve closed
6/26/2010	9:09:59 PM	Bypass valve closed
6/26/2010	9:09:59 PM	Bubbler valve closed
6/26/2010	9:09:59 PM	Helium MFC set to  0.000000
6/26/2010	9:09:59 PM	H2 MFC set to  0.000000
6/26/2010	9:09:59 PM	BCl3 MFC set to  0.000000
6/26/2010	9:09:59 PM	PHl3 MFC set to  0.000000
6/26/2010	9:09:59 PM	SiCl4 MFC set to  0.000000
6/26/2010	9:09:59 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	9:09:59 PM	Tube furnace set to 0
6/26/2010	9:09:59 PM	Run finished at 9:09 PM
6/26/2010	9:10:00 PM	Recipe started at 9:09 PM
6/26/2010	9:10:00 PM	Helium valve closed
6/26/2010	9:10:00 PM	BCl3 valve closed
6/26/2010	9:10:00 PM	PH3 valve closed
6/26/2010	9:10:00 PM	SiCl4 pre valve closed
6/26/2010	9:10:00 PM	SiCl4 post valve closed
6/26/2010	9:10:00 PM	Main Vac valve closed
6/26/2010	9:10:00 PM	Bypass valve closed
6/26/2010	9:10:00 PM	Bubbler valve closed
6/26/2010	9:10:00 PM	H2 valve opened
6/26/2010	9:10:00 PM	Helium MFC set to  0.000000
6/26/2010	9:10:00 PM	H2 MFC set to  500.000000
6/26/2010	9:10:00 PM	BCl3 MFC set to  0.000000
6/26/2010	9:10:00 PM	PHl3 MFC set to  0.000000
6/26/2010	9:10:00 PM	SiCl4 MFC set to  0.000000
6/26/2010	9:10:00 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	9:10:00 PM	Tube furnace set to 1000
6/26/2010	9:10:02 PM	Helium valve closed
6/26/2010	9:10:02 PM	BCl3 valve closed
6/26/2010	9:10:02 PM	PH3 valve closed
6/26/2010	9:10:02 PM	SiCl4 pre valve closed
6/26/2010	9:10:02 PM	SiCl4 post valve closed
6/26/2010	9:10:02 PM	Main Vac valve closed
6/26/2010	9:10:02 PM	Bypass valve closed
6/26/2010	9:10:02 PM	H2 valve opened
6/26/2010	9:10:02 PM	Bubbler valve opened
6/26/2010	9:10:02 PM	Helium MFC set to  0.000000
6/26/2010	9:10:02 PM	H2 MFC set to  500.000000
6/26/2010	9:10:02 PM	BCl3 MFC set to  0.000000
6/26/2010	9:10:02 PM	PHl3 MFC set to  0.000000
6/26/2010	9:10:02 PM	SiCl4 MFC set to  0.000000
6/26/2010	9:10:02 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	9:10:02 PM	Tube furnace set to 1000
6/26/2010	9:11:28 PM	Run aborted at 9:11 PM
6/26/2010	9:11:28 PM	Helium valve closed
6/26/2010	9:11:28 PM	H2 valve closed
6/26/2010	9:11:28 PM	BCl3 valve closed
6/26/2010	9:11:28 PM	PH3 valve closed
6/26/2010	9:11:28 PM	SiCl4 pre valve closed
6/26/2010	9:11:28 PM	SiCl4 post valve closed
6/26/2010	9:11:28 PM	Bypass valve closed
6/26/2010	9:11:28 PM	Main Vac valve closed
6/26/2010	9:11:28 PM	Bubbler valve closed
6/26/2010	9:11:28 PM	Helium MFC set to  0.000000
6/26/2010	9:11:28 PM	H2 MFC set to  0.000000
6/26/2010	9:11:28 PM	BCl3 MFC set to  0.000000
6/26/2010	9:11:28 PM	PHl3 MFC set to  0.000000
6/26/2010	9:11:28 PM	SiCl4 MFC set to  0.000000
6/26/2010	9:11:28 PM	Tube furnace set to 0
6/26/2010	9:12:11 PM	H2 MFC set to  500.000000
6/26/2010	9:12:19 PM	H2 MFC set to  100.000000
6/26/2010	9:12:35 PM	Bubbler valve closed
6/26/2010	9:12:39 PM	H2 MFC set to  0.000000
6/26/2010	9:12:40 PM	H2 valve closed
6/26/2010	9:13:09 PM	Program exited cleanly
6/26/2010	9:13:11 PM	Program started normally
6/26/2010	9:13:11 PM	Helium valve closed
6/26/2010	9:13:11 PM	H2 valve closed
6/26/2010	9:13:11 PM	BCl3 valve closed
6/26/2010	9:13:11 PM	PH3 valve closed
6/26/2010	9:13:11 PM	SiCl4 pre valve closed
6/26/2010	9:13:11 PM	SiCl4 post valve closed
6/26/2010	9:13:11 PM	Main Vac valve closed
6/26/2010	9:13:11 PM	Bypass valve closed
6/26/2010	9:13:11 PM	Bubbler valve closed
6/26/2010	9:13:11 PM	Helium MFC set to  0.000000
6/26/2010	9:13:11 PM	H2 MFC set to  0.000000
6/26/2010	9:13:11 PM	BCl3 MFC set to  0.000000
6/26/2010	9:13:11 PM	PHl3 MFC set to  0.000000
6/26/2010	9:13:11 PM	SiCl4 MFC set to  0.000000
6/26/2010	9:13:11 PM	Bypass solenoid MFC set to  760.000000
6/26/2010	9:13:11 PM	Tube furnace set to 0
6/26/2010	9:13:30 PM	Helium MFC set to  100.000000
6/26/2010	9:13:31 PM	Helium valve opened
6/26/2010	9:13:44 PM	Bubbler valve opened
6/26/2010	9:13:54 PM	Helium MFC set to  400.000000
6/26/2010	9:16:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/26/2010	9:16:38 PM	Recipe started at 9:16 PM
6/26/2010	9:16:38 PM	Helium valve closed
6/26/2010	9:16:38 PM	H2 valve closed
6/26/2010	9:16:38 PM	BCl3 valve closed
6/26/2010	9:16:38 PM	PH3 valve closed
6/26/2010	9:16:38 PM	SiCl4 pre valve closed
6/26/2010	9:16:38 PM	SiCl4 post valve closed
6/26/2010	9:16:38 PM	Main Vac valve closed
6/26/2010	9:16:38 PM	Bypass valve closed
6/26/2010	9:16:38 PM	Bubbler valve closed
6/26/2010	9:16:38 PM	Helium MFC set to  0.000000
6/26/2010	9:16:38 PM	H2 MFC set to  0.000000
6/26/2010	9:16:38 PM	BCl3 MFC set to  0.000000
6/26/2010	9:16:38 PM	PHl3 MFC set to  0.000000
6/26/2010	9:16:38 PM	SiCl4 MFC set to  0.000000
6/26/2010	9:16:38 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	9:16:38 PM	Tube furnace set to 0
6/26/2010	9:16:38 PM	Run finished at 9:16 PM
6/26/2010	9:16:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/26/2010	9:21:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2010	9:21:36 PM	Recipe started at 9:21 PM
6/26/2010	9:21:36 PM	Helium valve closed
6/26/2010	9:21:36 PM	H2 valve closed
6/26/2010	9:21:36 PM	BCl3 valve closed
6/26/2010	9:21:36 PM	PH3 valve closed
6/26/2010	9:21:36 PM	SiCl4 pre valve closed
6/26/2010	9:21:36 PM	SiCl4 post valve closed
6/26/2010	9:21:36 PM	Main Vac valve closed
6/26/2010	9:21:36 PM	Bubbler valve closed
6/26/2010	9:21:36 PM	Bypass valve opened
6/26/2010	9:21:36 PM	Helium MFC set to  0.000000
6/26/2010	9:21:36 PM	H2 MFC set to  0.000000
6/26/2010	9:21:36 PM	BCl3 MFC set to  0.000000
6/26/2010	9:21:36 PM	PHl3 MFC set to  0.000000
6/26/2010	9:21:36 PM	SiCl4 MFC set to  0.000000
6/26/2010	9:21:36 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	9:21:36 PM	Tube furnace set to 0
6/26/2010	9:22:24 PM	Helium valve closed
6/26/2010	9:22:24 PM	H2 valve closed
6/26/2010	9:22:24 PM	BCl3 valve closed
6/26/2010	9:22:24 PM	PH3 valve closed
6/26/2010	9:22:24 PM	SiCl4 pre valve closed
6/26/2010	9:22:24 PM	SiCl4 post valve closed
6/26/2010	9:22:24 PM	Bubbler valve closed
6/26/2010	9:22:24 PM	Main Vac valve opened
6/26/2010	9:22:24 PM	Bypass valve opened
6/26/2010	9:22:24 PM	Helium MFC set to  0.000000
6/26/2010	9:22:24 PM	H2 MFC set to  0.000000
6/26/2010	9:22:24 PM	BCl3 MFC set to  0.000000
6/26/2010	9:22:24 PM	PHl3 MFC set to  0.000000
6/26/2010	9:22:24 PM	SiCl4 MFC set to  0.000000
6/26/2010	9:22:24 PM	Bypass solenoid MFC set to  0.000000
6/26/2010	9:22:24 PM	Tube furnace set to 0
6/26/2010	9:22:25 PM	Run finished at 9:22 PM
6/26/2010	9:22:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
